研究目的
To extend the range of surface roughness measurements in the NMIJ's calibration service beyond the limits of ISO 19606:2017 (1 nm to 30 nm Ra) to meet industry demands for measurements above 30 nm and below 1 nm Ra.
研究成果
The calibration range for Ra measurements using a metrological AFM can be extended from 1 nm–30 nm to approximately 0.2 nm–100 nm, with uncertainties evaluated. Future work includes developing a new AFM for lower uncertainty in sub-nanometer measurements and validating results through comparisons with other institutes.
研究不足
The range extension is limited by probe-tip capabilities and AFM scanner stability; measurements near 100 nm Ra approach the upper limit for AFM cantilevers, and sub-nanometer measurements are constrained by interferometer nonlinearity and repeatability. The RSm range remains unchanged (0.04 μm to 2.5 μm), and further extension may require improved AFM design.
1：Experimental Design and Method Selection:
The study follows ISO 19606:2017 for surface roughness measurements using a metrological AFM, involving calibration of scanners, preliminary Ra and RSm measurements, probe-tip diameter evaluation, and roughness measurements of specimens. Uncertainty evaluation is performed using analysis of variance (ANOVA).
2：Sample Selection and Data Sources:
Two specimens were used: Specimen 1 (roughness standard with expected Ra >30 nm) and Specimen 2 (polished silicon wafer with expected Ra <1 nm). Data were acquired through AFM measurements.
3：List of Experimental Equipment and Materials:
Metrological AFM with laser interferometers, optical microscopes, confocal microscope, standard silicon cantilever probes (OMCL-AC160TS), probe-tip diameter evaluation standard plate (TGT1), specimens (Specimen 1 and Specimen 2), and software (Scanning Probe Image Processor).
4：Experimental Procedures and Operational Workflow:
Steps include calibration (skipped for metrological AFM), preliminary Ra and RSm measurements from multiple profiles, probe-tip diameter evaluation using a standard plate, roughness measurements at multiple points with specified scanning parameters, and uncertainty evaluation.
5：Data Analysis Methods:
Data analyzed using ANOVA for uncertainty, with calculations for Ra, RSm, probe-tip diameter, and error criteria based on ISO standards. Software tools include Scanning Probe Image Processor.
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