1：Experimental Design and Method Selection:

Se-Te films were deposited potentiostatically from an aqueous bath of 1.00 M H2SO4, 0.020 M SeO2, and 0.010 M TeO2. Substrates were p+-Si and n+-Si with (111) orientation, illuminated with polarized light from an LED source. Fourier-transform analysis of SEM images was used to assess pattern fidelity.

2：00 M H2SO4, 020 M SeO2, and 010 M TeOSubstrates were p+-Si and n+-Si with (111) orientation, illuminated with polarized light from an LED source. Fourier-transform analysis of SEM images was used to assess pattern fidelity. Sample Selection and Data Sources:

2. Sample Selection and Data Sources: p+-Si and n+-Si substrates with resistivity < 0.005 Ω-cm and (111) ± 0.5° crystal orientation were used. SEM images provided data for analysis.

3：005 Ω-cm and (111) ± 5° crystal orientation were used. SEM images provided data for analysis. List of Experimental Equipment and Materials:

3. List of Experimental Equipment and Materials: Equipment includes a potentiostat, LED light source (927 nm wavelength, 53 mW cm-2 power density), scanning electron microscope (SEM), and materials such as H2SO4, SeO2, TeO2, and Si substrates.

4：Experimental Procedures and Operational Workflow:

Films were deposited cathodically until a charge density of -750 mC cm-2 was passed. Illumination was constant and polarized. SEM imaging and FT analysis were performed on deposited films.

5：Data Analysis Methods:

2D Fourier transforms were used to analyze pattern periodicity and anisotropy. Lorentzian fits to FT peaks provided FWHM values as figures of merit.