研究目的
To prove the feasibility of the downstream-reactor PECVD of a continuous organosilicon-plasma coating onto a fine micropowder of about 15 μm in average particle diameter, for which a CFB reactor is not suitable.
研究成果
Repeated PECVD reprocessing with a downstream tubular reactor successfully deposited a continuous organosilicon-plasma coating on fine graphite micropowder. The coating, identified as amorphous hydrogenated silicon carbide with minor oxygen contamination, improved powder flowability and was characterized as rough and continuous after 6 runs. This demonstrates the downstream reactor's effectiveness for coating fine powders, with potential applications in industries requiring modified surface properties.
研究不足
The study is limited to fine graphite micropowder and may not generalize to other materials. The coating process requires multiple reprocessing runs to achieve continuity, which could be time-consuming. Oxygen contamination in the coating is a common issue in plasma processes. The downstream reactor may not be suitable for all powder types, especially those with different flow behaviors.
1:Experimental Design and Method Selection:
The study used a downstream tubular inductively-coupled RF plasma reactor for PECVD processing of graphite micropowder. The reactor design included a glass plasma tube, water cooling, RF power generation, vacuum system, and powder feeding. The powder was reprocessed 6 times to achieve a continuous coating. Characterization methods included FIB-SEM for imaging, Raman spectroscopy and XPS for chemical analysis, and flowability testing.
2:Sample Selection and Data Sources:
Synthetic graphite micropowder (TIMREX? KS5–25, 15 μm average particle diameter) was used. Data were obtained from direct experimental measurements on processed and native graphite samples.
3:List of Experimental Equipment and Materials:
Equipment included a downstream tubular plasma reactor, FIB-SEM (Zeiss NVision 40), Raman spectrometer (inVia Raman microscope, Renishaw), XPS (SIGMA Probe 2, Thermo Fisher), and ring shear tester (RST-XS, Schulze Schüttguttechnik). Materials included argon gas (PanGas), HMDS (Sigma-Aldrich), and graphite micropowder.
4:Experimental Procedures and Operational Workflow:
The reactor was evacuated to 3 Pa, then fed with a 1:1 Ar/HMDS mixture at 500 sccm and 150 Pa pressure. Plasma was ignited at 1200 W. Graphite powder was fed at 0.6 kg/h, with a residence time of ~0.1 s. After each run, the powder was collected and reprocessed. For characterization, samples were prepared and analyzed using FIB-SEM (milling and imaging), Raman spectroscopy (laser excitation at 514 nm), XPS (Al Kα source), and flowability testing (shear stresses applied).
5:6 kg/h, with a residence time of ~1 s. After each run, the powder was collected and reprocessed. For characterization, samples were prepared and analyzed using FIB-SEM (milling and imaging), Raman spectroscopy (laser excitation at 514 nm), XPS (Al Kα source), and flowability testing (shear stresses applied). Data Analysis Methods:
5. Data Analysis Methods: XPS data were analyzed using CasaXPS software with Gaussian–Lorentzian line shape and Shirley background subtraction. Quantitative analysis considered Scofield photoionization cross sections. Raman spectra were acquired and compared to standards. Flowability factors were calculated from shear test repetitions.
独家科研数据包,助您复现前沿成果,加速创新突破
获取完整内容-
Focused Ion-Beam Scanning Electron Microscope
NVision 40
Zeiss
Imaging of milled cross-sections of powder particles to observe coating morphology and thickness.
-
X-ray Photoelectron Spectrometer
SIGMA Probe 2
Thermo Fisher
Elemental composition and speciation analysis of the graphite surface.
暂无现货
预约到货通知
-
Hexamethyldisilane
HMDS
Sigma-Aldrich
Organosilicon monomer for PECVD coating.
暂无现货
预约到货通知
-
Raman Spectrometer
inVia Raman microscope
Renishaw
Chemical and structural investigation of graphite surface using Raman spectroscopy.
暂无现货
预约到货通知
-
Ring Shear Tester
RST-XS
Schulze Schüttguttechnik
Assessment of powder flowability by measuring flowability factor.
暂无现货
预约到货通知
-
Graphite Micropowder
TIMREX KS5–25
TIMREX
Substrate material for plasma coating deposition.
暂无现货
预约到货通知
-
Argon Gas
PanGas
Plasma feed gas component.
暂无现货
预约到货通知
-
Crystalline Silicon
Sigma-Aldrich
Reference material for Raman spectroscopy comparison.
暂无现货
预约到货通知
-
登录查看剩余6件设备及参数对照表
查看全部