1：Experimental Design and Method Selection:

The sensor design is based on a grating interferometer principle with a short-cavity structure to minimize temperature effects. The interference light intensity is modulated by acoustic waves, and the optical signal is converted to a voltage signal for detection.

2：Sample Selection and Data Sources:

The sensor chip is fabricated using an improved MEMS process on SOI and borosilicate glass wafers. Acoustic signals are generated using a speaker driven by a waveform generator, and responses are measured with calibration systems.

3：List of Experimental Equipment and Materials:

Includes MEMS fabrication tools (thermal oxidation, RIE, wet etching, sputtering, IBE, laser cutting, anodic bonding, DRIE), optical devices (laser diode, photodetector), and measurement instruments (optical spectrum analyzer, waveform generator, oscilloscope, acoustic sensor calibration system, temperature chamber).

4：Experimental Procedures and Operational Workflow:

Fabricate sensor chip via MEMS process steps; package with optical devices and conditioning circuit; test interference spectrum, acoustic response, frequency characteristics, and temperature stability.

5：Data Analysis Methods:

Use interference spectrum to calculate cavity length; analyze output voltage signals with FFT; compare sensor response with calibration microphone; evaluate sensitivity and stability through linear fits and temperature coefficient calculations.