Geometric parameters effect of the atomic force microscopy smart piezoelectric cantilever on the different rough surface topography quality by considering the capillary force

摘要： Nowadays, the atomic force microscopy (AFM) is widely used in the nanotechnology as a powerful nano-robot. The surface topography in Nanoscale is by far one of the most important usages of the AFM device. Hence, in this article, the vibration motion of a piezoelectric rectangular cross-section micro-cantilever (MC) which oscillates in the moist environment has been examined based on the Timoshenko beam theory. After extracting the MC governing equations according to Hamilton's principle, the finite element method has been used to discretize the motion equations. The surface topography has been simulated for various roughness forms in the tapping and non-contact modes by considering the effects of the Van der Waals, capillary and contact forces. Also, the experimental results obtained from the glass surface topography have been simulated. The results illustrate that the time delay in higher natural frequencies in the tapping mode is shorter in comparison with the non-contact mode, especially, for the lower natural frequencies. The sensitivity analysis of the natural frequencies, topography depth and time delay have been simulated. Results indicate that the most effective parameter is the MC length. In the first mode, the first section length has the highest effect on the surface topography time delay, also, in the second vibration mode; the most effective parameter on the time delay is the MC tip length based on the simulation results.