A Novel CMUTs-based Resonant Biochemical Sensor Using Electrospinning Technology

摘要： A novel CMUTs-based resonant biochemical sensor was presented to detect SO2 with a sensitive polymer electrospinning technology. The electrospinning technology was proposed as an innovative functionalization method to fabricate nano reticular polymer fibers with the diameters of 50 nm~500 nm on the movable plates of the CMUTs. The surface topography of electrospun nanofibers and the impedance properties of functionalized CMUTs were characterized. The CMUTs-based resonant biochemical sensor was packaged to detect SO2 in the experiments. Its resonant frequency shifts varied against the variation of SO2 concentration. The influences of the mixed gas flow rate were also analyzed. These showed the proposed sensor had good volume sensitivity and frequency stability.