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CO Gas Sensor based on E-beam Evaporated ZnO, MgZnO and CdZnO Thin Films: A Comparative Study
摘要： This paper reports a comparative study of electron-beam evaporated ZnO, MgZnO and CdZnO thin film based gas sensor. At room temperature (RT), these semiconductive thin films were deposited on Si/SiO2 substrate and an interdigitated pattern of chromium electrode deposited on these films. Device properties such as structural, optical and electrical have been reported and analyzed. The sensors have been tested at different operating temperatures. At 250 ℃, the sensor shows the best response for CdZnO thin films. We have obtained sensor response 4.86 with response time 15 sec for 100 PPM carbon mono oxide (CO) gas concentration for CdZnO thin film. Based on experimental results, Cd-doped ZnO has been found most suitable among these semiconducting metal oxides, when used as a CO gas sensor. A correlation between structural, optical and electrical properties with these thin films has also been established.
关键词： Thin film,ZnO,MgZnO,CO Gas sensor,CdZnO,E-beam evaporation
更新于2025-09-23 15:23:52
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Rock-salt CdZnO as a transparent conductive oxide
摘要： Transparent conducting oxides (TCOs) are widely used in applications from solar cells to light emitting diodes. Here, we show that the metal organic chemical vapor deposition (MOCVD)-grown, rock-salt CdZnO ternary, has excellent potential as a TCO. To assess this compound, we use a combination of infrared reflectance and ultraviolet-visible absorption spectroscopies, together with Hall effect, to determine its optical and electrical transport characteristics. It is found that the incorporation of Zn produces an increment of the electron concentration and mobility, yielding lower resistivities than those of CdO, with a minimum of 1:96 (cid:2) 10(cid:3)4 X (cid:4) cm for a Zn content of 10%. Moreover, due to a combination of increasing bandgap energy and band filling, the absorption band-edge energy increases from 2.58 eV in CdO up to 2.89 eV for 15% Zn, yielding a largely enhanced transparency in the visible. The low required growth temperatures, together with the scalability of CVD deposition, provide an excellent ground for the integration of this TCO ternary alloy on foreign devices.
关键词： Hall effect,ultraviolet-visible absorption,MOCVD,infrared reflectance,CdZnO,Transparent conducting oxides
更新于2025-09-10 09:29:36