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Impact of composition and ex-situ laser irradiation on the structure and optical properties of As-S-based films synthesized by PECVD
摘要： Synthesis of amorphous chalcogenide As-S-based films with arsenic content from 35 to 55 at. % by a PECVD method is achieved. The composition-structure-optical properties relationship is revealed. Varying the composition of the films from As35S65 to As55S45 is accompanied by a change of the dominant structural units: from AsS3/2 pyramids to cage-like As4S4 and As4S3 units, causing a considerable decrease of the optical band gap from 2.42 to 1.87 eV. It has been found out that modification by a focused laser irradiation (473 nm) leads to formation of micro/nanocrystalline inclusions feasible for applications in medicine, optoelectronics and integrated optics. The type of inclusions depends on the dominant structural units of the initial films. In case of the As55S45 film appearance of the dimorphite crystalline phase (α-As4S3) is observed. The ex-situ laser modification of the As-S films leads to appearance of a photoluminescence emission, and its maximum position shifts from 1.8 to 2.05 eV depending on the initial film stoichiometry.
关键词： Optical properties,Arsenic sulfide,Chalcogenide films,Nanocrystals formation,PECVD
更新于2025-09-16 10:30:52
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[IEEE 2018 20th International Conference on Transparent Optical Networks (ICTON) - Bucharest (2018.7.1-2018.7.5)] 2018 20th International Conference on Transparent Optical Networks (ICTON) - Plasma Preparation of the Top-Quality Phase Change Materials Based on As-Se-Te Chalcogenide System
摘要： The excellence of the Plasma-Enhanced Chemical Vapor Deposition (PECVD) approach in terms of preparation of the top-quality phase change materials based on As-Se-Te chalcogenide ternary system has been demonstrated. The samples were synthesized via direct interaction of arsenic, selenium and tellurium vapors into low-temperature non-equilibrium RF (40 MHz) plasma discharge at low pressure. The amorphous films with high degree of structural and chemical uniformity have been prepared in the broad range of contents, in particular, the chemical compositions going beyond the region of glass formation.
关键词： PECVD,chalcogenide films,phase change materials
更新于2025-09-09 09:28:46