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Versatile Processing of Metal-Organic Framework-Fluoropolymer Composite Inks with Chemical Resistance and Sensor Applications
摘要: We report a new class of MOF inks with a water-repellent, photocurable fluoropolymer (PFPE) having up to 90 wt% MOF loading. These MOF inks enable to process various MOFs through spray coating, pen writing, stencil printing, and moulding at room temperature. Upon UV-curing, the hydrophobic PFPE matrix efficiently blocks water permeation but allows accessibility of chemicals into MOF pores, thereby freeing the MOF to perform its unique function. Moreover, by introducing functional MOFs we successfully demonstrated a water-tolerant chemosensor for a class of aromatic pollutants in water and a chemical-resistant thermosensor for visualizing temperature image. This approach would open up innumerable opportunities for those MOFs that are otherwise dormant.
关键词: MOF-polymer composite,Chemosensor,MOF processing,Thermosensor,Metal-Organic Framework,Chemical resistance
更新于2025-09-23 15:23:52
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Novel Gap Filling BARC with High Chemical Resistance
摘要: In the recent of the semiconductor manufacturing process, variety of properties (narrow gap-filling and planarity etc.) are required to organic BARC in addition to the conventional requirements. Moreover, SC-1 resistance is also needed because BARC is often used as a wet etching mask when TiN processing. But conventional BARC which include crosslinker does not have enough SC-1 resistance, and we found that it is also difficult to obtain good gap-filling and good planarity because of outgassing and film shrinkage derived from the crosslinker. In this study, we have developed the new self-crosslinking BARC. The new crosslinking system shows low outgassing and film shrinkage because of not including crosslinker. So, novel BARC has better gap filling property and planarity and over 3 times higher SC-1 resistance than that of conventional BARC. Moreover, by adding the low molecular weight additive which has high adhesive unit to TiN surface, the novel BARC has over 10 times higher SC-1 resistance than that of conventional BARC. And this novel BARC can be applied both ArF & KrF lithography process because of broad absorbance, high etching rate, chemical resistance (SC-1, SC-2, DHF, and others) and good film thickness uniformity. In this paper, we will discuss the detail of new self-crosslinking BARC in excellent total performance and our approach to achieve high chemical resistance.
关键词: KrF,ArF,Self-crosslinking,Gap filling,Planarity,Chemical resistance,BARC
更新于2025-09-23 15:22:29
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Copper doped nickel aluminate: Synthesis, characterisation, optical and colour properties
摘要: Novel environment friendly inorganic nano green pigments, Ni1-xCuxAl2O4 (x = 0, 0.02, 0.04, 0.06, 0.08, 0.1) were successfully synthesized by simple, cost effective sol-gel method using citric acid as a gelling agent. Synthesized nano pigments were characterised by powder XRD, FT-IR, UV-DRS, SEM-EDX and TEM. Distribution of elements such as Ni, Cu, Al and O for the pigment Ni0.98Cu0.02Al2O4 was authenticated by elemental mapping analysis. The color parameters were studied using CIE-LAB parameters. It is evident from the DRS measurement that the band gap energy of NiAl2O4 (3.11eV) has been massively diminished to 2.63 eV when x = 0.02, unexpectedly changed the color of the pigment from cyan to green. While x = 0.1 the pigment color has turned into grey and the corresponding band gap condensed into 2.17 eV. Effect of mineralisers like NaF, CaF2, NH4H2PO4 and Li2CO3 on the color of Ni0.98Cu0.02Al2O4 was investigated.
关键词: chemical resistance,sol-gel,citric acid,Nickel aluminate,green pigment
更新于2025-09-23 15:22:29
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Contents: (Adv. Funct. Mater. 44/2018)
摘要: Silica nanofibrous membranes produced by direct electrospinning of a sol-gel solution without a sacrificing polymer allow high-end separation and purification due to a high thermal and chemical resistance. The water repellent or absorbing nature can be tuned by applying a humidity or thermal treatment. It is showcased that fast gravity driven membrane separation of heterogeneous azeotropes can be achieved.
关键词: thermal resistance,chemical resistance,sol-gel,electrospinning,azeotrope separation,silica nanofibrous membranes
更新于2025-09-23 15:21:01