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Effect of post deposition annealing on the electrical properties of YSZ thin films deposited by pulsed laser technique
摘要： In this paper we report the detailed analysis of the effect of in-situ annealing on the electrical properties of yttrium stabilized zirconium oxide (YSZ) thin films grown by pulsed laser deposition on silicon substrates. The optimized metal/YSZ/Si devices showed low leakage current, good dielectric strength and a breakdown field strength of 4.13 MV/cm. The magnitudes of flat band voltage, and interfacial charge density have been extracted from the capacitance-voltage (C-V) characteristics of the MOS structure. The C-V characteristics show a small hysteresis which indicates the presence of traps. The observed shift in the flat band voltage and hysteresis are explained with the help of X-ray photoelectron spectroscopy. From the XPS depth profile analysis of the samples it was found that as we go from the surface to the interface, oxygen concentration in the deposited film decreases, i.e. the oxide becomes zirconium rich. This has been correlated with the observed electrical properties.
关键词： Thin films,Interface,Dielectric breakdown,Gate dielectric,Zirconium oxide (ZrO2),Pulsed laser deposition
更新于2025-09-16 10:30:52
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Adapted Pechini method to prepare DSA type electrodes of RuO2-ZrO2 doped with Sb2O5 over titanium plates
摘要： This paper describes a thermal method to obtain metal oxides on a titanium substrate surface. This adapted Pechini method is a versatile, easy to handle and scalable technique to obtain electrodes for industrial uses, such as Dimensionally Stable Anodes (DSA). This method has advantages over other thermal methods like dip coating or sputtering, as it needs a smaller amount of polymeric mixture than dip coating method to cover the same area and is less expensive than sputtering method. The thermal method described herein to prepare DSA type electrodes of RuO2-ZrO2 doped with Sb2O5 over titanium plates needs no sophisticated equipment as spray pyrolysis technique does; a muffle, ultrasonic equipment, and a hot plate magnetic stirrer are the principal apparatus necessary to carry out the adapted Pechini method. On the other hand, this method allows metal oxides to disperse homogeneously. The cyclic voltammograms showed the stability of DSA, and the accelerated life test allowed establishing its useful life (18.18 years) at a current density of 10 mA cm-2.
关键词： Zirconium oxide ZrO2,thermal method,polymer mixture,Dimensionally Stable Anode,pretreatment of the titanium,metallic precursors,Antimony oxide Sb2O5,Ruthenium oxide RuO2
更新于2025-09-10 09:29:36