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Development of ultra-thin doped poly-Si via LPCVD and ex-situ tube diffusion for passivated contact solar cell applications
摘要： Rear side application of polycrystalline silicon (poly-Si) passivated contacts has demonstrated very high efficiencies for single-junction monocrystalline silicon (mono-Si) solar cells. To further improve the device performance, one possible approach is to apply the passivated contact concept to the front side of the solar cell as well. The front side application requires the use of ultra-thin poly-Si layer in order to suppress parasitic absorption. Suitable ex-situ diffusion process should be developed accordingly without damaging the passivation provided by the very thin interface oxide (iOx). In this work, we prepared symmetric lifetime samples of ultra-thin poly-Si (<30 nm) via low pressure chemical vapour deposition (LPCVD) method. Then we studied and optimised the ex-situ POCl3/BBr3 diffusion doping processes. An excellent passivation quality was demonstrated with a high implied open-circuit voltage (iVoc) of up to 730 mV (on symmetric n+ poly-Si lifetime samples) and 700 mV (on symmetric p+ poly-Si lifetime samples). For possible contact formation, we capped the poly-Si with sputter-deposited ZnO:Al, which shows good opto-electrical properties and firing stability at 650 °C.
关键词： Diffusion,ZnO:Al,Ex-situ doping,Ultra-thin poly-Si,Passivated contact
更新于2025-09-23 15:19:57
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Coupling and Trapping of Light in Thin-Film Solar Cells Using Modulated Interface Textures
摘要： Increasing the e?ciency of solar cells relies on light management. This becomes increasingly important for thin-?lm technologies, but it is also relevant for poorly absorbing semiconductors like silicon. Exemplarily, the performance of a-Si:H/μc-Si:H tandem solar cells strongly depends on the texture of the front and rear contact surfaces. The rear contact interface texture usually results from the front surface texture and the subsequent absorber growth. A well-textured front contact facilitates light-coupling to the solar cell and light-trapping within the device. A variety of di?erently textured ZnO:Al front contacts were sputter deposited and subsequently texture etched. The optical performance of a-Si:H/μc-Si:H tandem solar cells were evaluated regarding the two e?ects: light-coupling and light-trapping. A connection between the front contact texture and the two optical e?ects is demonstrated, speci?cally, it is shown that both are induced by di?erent texture properties. These ?ndings can be transferred to any solar cell technologies, like copper indium gallium selenide (CIGS) or perovskites, where light management and modi?cations of surface textures by subsequent ?lm growth have to be considered. A modulated surface texture of the ZnO:Al front contact was realized using two etching steps. Improved light-coupling and light-trapping in silicon thin-?lm solar cells lead to 12.5% e?ciency.
关键词： thin-?lm solar cell,light-trapping,ZnO:Al,front contact,light-scattering,surface texture,light-coupling
更新于2025-09-16 10:30:52
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AZO (ZnO:Al) Transparent Conductive Film Prepared by Plasma Enhanced Chemical Vapour Deposition and its Performances in Comparison with ZnO Film
摘要： In this paper, AZO(ZnO:Al) polycrystalline thin films have been fabricated by PECVD (plasma enhanced chemical vapour deposition) method. Based on PECVD method, the fabrication process of AZO film is shown in detail. Furthermore, the measurements of the film electro-optical properties have been bringing forth, in comparison with ZnO film. The results suggested that based on PECVD method, AZO films with strong adhesion to the substrate, as low as 89 ?/% of square resistance and as high as 85 % of visible light transmittance have been deposited on the glass substrate and the silicon substrate, respectively.
关键词： Transparent conductive film,Plasma enhanced chemical vapour deposition,AZO (ZnO:Al)
更新于2025-09-09 09:28:46
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Propriedades de filmes finos de ZnO:Al depositados sobre substratos de poliimida à temperatura ambiente para aplica??es em dispositivos optoeletr?nicos flexíveis
摘要： This work investigated the properties of ZnO:Al thin films produced by radio frequency magnetron sputtering onto polyimide substrates for use as flexible electrodes in optoelectronic devices. For comparison purposes, films were also grown on soda lime glass. The films were deposited with different working powers, onto substrates kept at room temperature. The effects of the power and thickness on the optical, electrical and structural properties of the films were investigated. Atomic force microscopy images revealed that the films were nanocrystalline, with low surface roughness. Values of sheet resistance and transmittance in the visible range were 8 ?/sq (corresponding to 6x10-4 W.cm) and 75%, respectively, which can be considered satisfactory, particularly taking into consideration that deposition was carried out at room temperature.
关键词： transparent electrical contacts,ZnO:Al,flexible transparent electrodes
更新于2025-09-04 15:30:14