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17.3: Black Photoresist Achieving Patterns with Extremely Low Reflection and Smooth Line Edge
摘要： This paper introduces a new type of black photoresist with a very low reflectance and very smooth pattern line edge that doesn't require adding micron-size particles. Combinations of poor solvent, good solvent, and selected special substances as solutes in the black photoresist can achieve matte surface during drying process. Because particles are not used to achieve matte surface, the line edge will be very smooth. This photoresist is likely appropriate for applications where light reflection or light scattering should be avoided, such as black matrix and smartphone camera surroundings.
关键词： black matrix,low reflective index,smart phone camera,matte surface,Black photoresist,line edge roughness
更新于2025-09-23 15:23:52
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Study of correlation between edge roughness and gas flow characteristics in laser beam fusion cutting
摘要： Fiber laser fusion cutting trials on AISI 304 stainless steel sheets of 10 mm thickness were performed with the aim to gain further insights into the striation formation process on cut edges. The study is based on a factorial Design-of-Experiment (DoE) approach with consideration of laser power, focal plane position, gas pressure, nozzle stand-off and nozzle diameter as control factors. Analyzed responses include the achievable cutting speed, the cut kerf geometry and the cut edge roughness. In addition, numerical simulations of the cutting gas flow were carried out for adapted kerf geometries and gas parameters. The evaluation of these results reveals strong correlations between experimental roughness values and the numerically computed rear-directed shear stress component within the transition zone between cutting front and cut edge surface. This finding supports the hypothesis that the particular characteristics of the boundary layer zone of the cutting gas flow affects the structure and roughness of cut edges.
关键词： Laser beam fusion cutting,edge roughness,modelling and simulation,gas flow characteristics,design-of-experiments
更新于2025-09-12 10:27:22
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Designing an anisotropic noise filter for measuring critical dimension and line edge roughness from scanning electron microscope images
摘要： The scanning electron microscope (SEM) is often employed in inspecting patterns transferred through a lithographic process. A typical inspection is to measure the critical dimension (CD) and line edge roughness (LER) of each feature in a transferred pattern. Such inspection may be done by utilizing image processing techniques to detect the boundaries of a feature. Since SEM images tend to include a substantial level of noise, a proper reduction of noise is essential before the subsequent process of edge detection. In a previous study, a method of designing an isotropic Gaussian filter adaptive to the noise level was developed. However, its performance for relatively small features was not so good as for large features, especially in the case of LER. The main objective of this study is to improve the design method such that the accuracy of the measured CD and LER is not deteriorated substantially as the feature size decreases. The new design method allows a Gaussian filter to be anisotropic for the better adaptability to the signal and noise, both of which show a substantial level of directional correlation. The cutoff frequency for the direction normal to features is determined to include most of the signal components, and the cutoff frequency in the other direction is set to balance the signal and noise components to be included. This procedure enables a systematic and easy design of the filter. Also, the method of estimating the noise has been modified for higher accuracy. The performance of the new design method has been thoroughly analyzed using the reference images for which feature boundaries are known. It has been shown that the anisotropic filter designed by the proposed method performs better than the isotropic filter from the viewpoint of CD, LER, and power spectral density accuracy.
关键词： critical dimension,image processing,anisotropic noise filter,scanning electron microscope,line edge roughness
更新于2025-09-04 15:30:14