[IEEE 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Kyoto, Japan (2018.7.9-2018.7.13)] 2018 31st International Vacuum Nanoelectronics Conference (IVNC) - Preliminary imaging in miniature MEMS electron microscope

摘要： A preliminary imaging concept in a miniature MEMS electron microscope is presented. The setup of the measurements is described and the mechanism of the imaging process is explained. Authors present also results of simulations and measurements concerning electron beam passing through thin silicon nitride membrane. The scattering angle of the electron beam is calculated. This parameter is both advantage and disadvantage for the imaging process. Preliminary (the first) image of copper wire placed over the membrane is presented.