研究目的
Investigating the preliminary imaging concept and mechanism in a miniature MEMS electron microscope, including the transmission of electron beam through thin silicon nitride membrane and its implications for imaging.
研究成果
The preliminary results demonstrate the feasibility of imaging using a miniature MEMS electron microscope, despite the challenges posed by electron beam scattering. The first image of a copper wire was successfully obtained, indicating potential for further development and application in electron microscopy.
研究不足
The study is preliminary, and the imaging process is affected by the scattering of the electron beam, leading to blurred images. The technique's applicability to different types of samples and the enhancement of image quality through software processing are areas for future optimization.
1：Experimental Design and Method Selection:
The study involves the use of a Scanning Electron Microscope (SEM) as a reference measurement system to investigate the transmission of an electron beam through a thin silicon nitride membrane. Simulations using CASINO software were conducted to estimate the scattering angle of the electron beam.
2：Sample Selection and Data Sources:
The samples include thin silicon nitride membranes of different thicknesses and a copper wire. Data on electron transmission and scattering angles were collected.
3：List of Experimental Equipment and Materials:
SEM JEOL JSM IT-100, planar silicon cathode with electrophoretically deposited CNT, thin silicon nitride membrane, phosphor screen (ITO glass with ZnS:Ag phosphor layer), YAG crystal screen, CCD camera.
4：Experimental Procedures and Operational Workflow:
The electron beam's transmission through the membrane was measured, and the scattering angle was calculated. The imaging process was observed using a CCD camera.
5：Data Analysis Methods:
The transmission coefficient was defined as the ratio between the electron current passing through the membrane and the initial electron current. Scattering angles were calculated based on simulations.
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