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Athermal and Soft Multi‐Nanopattern of Azopolymer Enabled by Phototunable Mechanics
摘要： Imprinting nanopatterns on flexible substrates has diverse applications in advanced fabrication. However, the traditional thermal nanoimprint lithography (T-NIL) often causes shrinkage upon cooling. Although this can be partly avoided by employing ultraviolet-curable nanoimprint lithography (UV-NIL), it is still difficult to generate multiple and rewritable nanopatterns. Here, a simple yet versatile method is introduced to fabricate multiple nanopatterns on flexible substrate coated with azopolymer by combining athermal nanoimprint lithography (AT-NIL) and photolithography. The azopolymer is chosen as the surface coating due to its intriguing variability of mechanical properties upon photoirradiation, which includes: (1) phototunable glass transition temperatures (Tgs) and concomitantly photoinduced switch from glassy plastic to viscoplastic polymer; (2) prominent modulation of viscoplasticity under light illumination at different wavelengths. Regionally-selective multiple nanopatterns are conveniently fabricated, presenting angle-dependent structural-color images on poly(ethylene terephthalate) (PET) substrates. The flexible, athermal and multiple nanopatterning method may provide enlightenment for on-demand fabrication of complex nanopatterns.
关键词： multiple nanopatterns,azobenzene-containing polymer (azopolymer),phototunable mechanics,athermal imprint lithography,flexible nanopatterns
更新于2025-09-12 10:27:22
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Athermal and Soft Multi-Nanopattern of Azopolymer Enabled by Phototunable Mechanics
摘要： Imprinting nanopatterns on flexible substrates has diverse applications in advanced fabrication. However, the traditional thermal nanoimprint lithography (T-NIL) often causes shrinkage upon cooling. Although this can be partly avoided by employing ultraviolet-curable nanoimprint lithography (UV-NIL), it is still difficult to generate multiple and rewritable nanopatterns. Here, a simple yet versatile method is introduced to fabricate multiple nanopatterns on flexible substrate coated with azopolymer by combining athermal nanoimprint lithography (AT-NIL) and photolithography. The azopolymer is chosen as the surface coating due to its intriguing variability of mechanical properties upon photoirradiation, which includes: (1) phototunable glass transition temperatures (Tgs) and concomitantly photoinduced switch from glassy plastic to viscoplastic polymer; (2) prominent modulation of viscoplasticity under light illumination at different wavelengths. Regionally-selective multiple nanopatterns are conveniently fabricated, presenting angle-dependent structural-color images on poly(ethylene terephthalate) (PET) substrates. The flexible, athermal and multiple nanopatterning method may provide enlightenment for on-demand fabrication of complex nanopatterns.
关键词： multiple nanopatterns,azobenzene-containing polymer (azopolymer),phototunable mechanics,athermal imprint lithography,flexible nanopatterns
更新于2025-09-12 10:27:22