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oe1(光电查) - 科学论文

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  • [Laser Institute of America ICALEO?? 2016: 35th International Congress on Applications of Lasers & Electro-Optics - San Diego, California, USA (October 16a??20, 2016)] International Congress on Applications of Lasers & Electro-Optics - Optimized strategies for seamless stitching with synchronized galvo scanner and linear axis

    摘要: Laser surface texturing using ultra short pulsed lasers in combination with galvo scanners is limited to the scan field of the galvo scanner which is typically 65x65 mm using a 160 mm objective. By combine the galvo scanner with an additional high precision linear axis, it is possible to enhance the working field. Increased surface roughness and visible seams in the intersection region have to be avoided to preserve the high quality achieved by using ultra short pulsed laser systems. Strategies to minimize this influence are developed by using a system with a synchronized galvo scanner and by working with b/w bitmaps in a raster scanning mode. This allows splitting an image into two sub-images and compare different strategies for its recombination on the sample. For these tests always the whole image is scanned but with laser switched off alternating for the left and the right sub-image. This setup offers the possibility to evaluate different stitching strategies for the combination of two sub-images without influence of the exact alignment of the linear axis to the galvo scanner. Transferring the stitching strategy to a system including one or two linear axes needs a perfect alignment of the two coordinate systems to preserve the high accuracy. Therefore, a solution for aligning the two coordinate systems with highest accuracy will be presented as well.

    关键词: galvo scanners,laser surface texturing,ultra short pulsed lasers,stitching strategies,linear axis

    更新于2025-09-16 10:30:52

  • [IEEE 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Munich, Germany (2019.6.23-2019.6.27)] 2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) - Stitch-Free Fabrication of Microoptical Elements Employing Femtosecond Laser 3D Lithography

    摘要: Microoptics is a fast expanding field showing huge potential in providing science and industry with small yet highly functional tools for light control at a micro-scale. One of the most promising technologies to produce such elements is 3D laser lithography (3DLL) as it enables fabrication of free-form 3D objects with resolution and surface roughness control down to nm level. Despite current progress there is still some limitations concerning microoptical element printing. In this work we present an approach of synchronizing linear stages and galvo-scanners for rapid (up to several mm/s translation velocity) and stitch-free printing of functional microoptics with the optical grade surface finish and overall size up to several mm. These include mm sized refractive microlenses, Fresnel lenses, microprisms and opaque apertures. All these elements are produced in a single printing step showing the potency of 3DLL as a straight-forward and relatively simple technology to produce microoptics at these sizes. Quality and functionality of these elements are investigated in qualitative and quantitative fashions. Outlook on challenges occurring while working in this size scale is provided, possible solutions to tackle them are proposed.

    关键词: 3D laser lithography,linear stages,stitch-free printing,Microoptics,galvo-scanners

    更新于2025-09-11 14:15:04