Terahertz and Infrared Spectroscopy of Dense and Porous Organosilicate Glass Thin Films

摘要： Wide-range measurements of thin films of SiCxOyHz organosilicate glasses, both dense and porous, deposited on dielectric sapphire substrates and conductive layers of platinum and aluminum, were performed in the THz–IR (5–5000 cm–1) range. This method can be used not only to analyze the evolution of absorption bands in amorphous dielectric films but also to evaluate static conductivity in the framework of the Drude model of conductive layers and to determine the electrodynamic characteristics of organosilicate films with low dielectric permittivity. The original approach proposes a comprehensive analysis of experimental broadband data in order to determine not only the parameters of the individual bands of lattice and molecular vibrations but also the integrated electrodynamic characteristics of the samples obtained.