24.4: High Performance Top-gate Self-aligned Coplanar a-IGZO TFTs with Light Shielding Metal Design

摘要： The TG-SA a-IGZO TFTs with different light shielding metal (SM) layers design were demonstrated and compared in this paper. Their electrical characteristics have been measured in order to systematically analyze the effect that the SMs ever made on. The relationship between device instability and different SMs design have been systematically analyzed. Then the prototype 14” OLED display with an excellent performance using TG-SA a-IGZO TFTs backplane have been made successfully, which indicates an excellent mass-production prospect.