研究目的
To investigate different approaches to the integration of self-assembled Ge(Si) quantum dots into two-dimensional photonic crystals and to study the luminescence properties of such systems.
研究成果
Different approaches to the incorporation of ordered self-assembled arrays of Ge(Si) quantum dots into microcavities based on two-dimensional photonic crystals were considered. It was shown that, by varying the diameter of photonic crystal holes, it is possible to actualize two modes of growth of quantum dots such that the quantum dots are formed inside or outside the photonic crystal holes. An increase in the intensity of the photoluminescence signal at room temperature in the spectral range 0.9–1.2 eV was detected for structures with ordered quantum dots incorporated into a photonic crystal.
研究不足
The relatively low surface density of ordered quantum dots and the increased Si fraction in them compared to quantum dots formed on a planar Si surface. The low surface density of ordered quantum dots is responsible for the predominance of the signal from the Ge wetting layer in the PL spectra of structures with ordered quantum dots.
1：Experimental Design and Method Selection:
Two approaches were considered for the production of an ordered array of quantum dots incorporated into a photonic crystal. The first approach involved growing a structure with an array of quantum dots followed by the formation of a photonic crystal on this structure. The second approach involved forming the photonic crystal before growing the quantum dot structure.
2：Sample Selection and Data Sources:
Silicon-on-insulator (SOI) substrates were used. The substrate surface was textured by electron-beam lithography and plasma-assisted chemical etching.
3：List of Experimental Equipment and Materials:
Molecular-beam epitaxy (MBE) setup, scanning electron microscopy (SEM), microphotoluminescence (micro-PL) measurements setup with a high spatial and spectral resolution, Bruker IFS 125HR Fourier spectrometer.
4：Experimental Procedures and Operational Workflow:
The fabrication of structures involved texturing the substrate surface, growing spatially ordered arrays of Ge(Si) quantum dots, and forming photonic crystals. The luminescence properties were studied by micro-PL measurements.
5：Data Analysis Methods:
The micro-PL signal was detected with a cooled Ge detector, using a Bruker IFS 125HR Fourier spectrometer.
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