研究目的
Investigating the effect of Al-Zr co-doping on the electrical properties of Graphene/ZnO Schottky Contact.
研究成果
The average grain size of Al-Zr-ZnO films decreases by increasing Al or Zr ion doping concentration. The surface defect oxygen of Al-Zr-ZnO films decreases due to ion doping. The barrier height of graphene/ Al-Zr-ZnO Schottky contact increased and ideality factor decreased, indicating that the rectifying characteristics of graphene/Al-Zr-ZnO Schottky contacts was enhanced due to ion co-doping. This is considered that oxygen vacancies of Al-Zr-ZnO films decreases due to the ion doping and weakens Fermi level pinning.
研究不足
The study is limited to the effect of Al-Zr co-doping on the electrical properties of Graphene/ZnO Schottky Contact. The potential areas for optimization include the doping concentration and the annealing temperature.
1：Experimental Design and Method Selection:
The Al-Zr-ZnO films were fabricated on n-Si（111）substrates by the sol-gel method. Zinc acetate hexahydrate is the solute and ethylene glycol is the solvent. The solubility of Zn2+ ion is
2：5 mol/L. The concentration of doped ions depends on the percentage of Al3+/Zn2+ ions and Zr4+/Zn2+ ion. Sample Selection and Data Sources:
The Al-Zr-ZnO films with different doping concentrations were prepared and analyzed.
3：List of Experimental Equipment and Materials:
Zinc acetate hexahydrate, ethylene glycol, diethanolamine, Al and Zr dopants, n-Si（111）substrates.
4：Experimental Procedures and Operational Workflow:
The mixing solution is stirred for 2 h, and held for 24 h. The main parameters of spinning coating are 3000 rpm, 30 s. After each spin coating, the sample is baked in oven for 15 min. After 8 times of the above process, the Al-Zr-ZnO films with the thickness about 740 nm was obtained. All samples are placed in an annealing furnace at 600 0C for 1 h.
5：Data Analysis Methods:
The phase structure, surface micromorphology and optical properties of Al-Zr-ZnO films were analyzed by X-ray diffraction, atomic force microscopy, and ultraviolet-visible spectrophotometer. The surface states of Al-Zr-ZnO films were analyzed by X-ray photoelectron spectroscopy. The electrical properties of the graphene/Al-Zr-ZnO/graphene Schottky contacts were measured by a Keithley 2400 source meter.
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