摘要： Besides the optimization of the laser and processing parameters, the adaptation of the focal intensity distribution offers great potential for a well-defined control of laser processing and for improving the processing results. In this paper, different tailored intensity distributions were discussed with respect to their suitability for femtosecond laser material processing on the micro- and nanoscale such as cutting, marking, and the generation of laser-induced periodic surface structures. It was shown by means of laser processing of stainless steel that the numerical simulations for the beam shaping unit are in good agreement with the experimental results. Also, the suitability of the beam shaping device to work with a scanner and an F-theta lens as commonly used for material processing was demonstrated. In this context, the improvement of the machining results was shown experimentally, and a significant reduction of the machining time was achieved.