研究目的
Investigating the development of a compact omnidirectional laser scanner based on an electrothermal tripod MEMS mirror for LiDAR applications, aiming to reduce size, cost, and power consumption compared to traditional motor-based scanners.
研究成果
An omnidirectional laser scanner based on a tripod electrothermal MEMS mirror has been developed, capable of circular scanning at a non-resonant mode. This design eliminates the need for complicated packaging and resonant scanning issues, offering smaller size, weight, and power consumption compared to traditional motor-based scanners.
研究不足
The beam divergence caused by the cone mirror is under investigation. The feasibility of applying this MEMS scanner for LiDAR will be studied in the near future.
1：Experimental Design and Method Selection:
The study focuses on designing a compact omnidirectional scanner using a two-axis tripod electrothermal MEMS mirror combined with a cone mirror for circular pattern generation at non-resonant mode.
2：Sample Selection and Data Sources:
The MEMS mirror is fabricated on an SOI wafer with specific layers for bimorph actuators.
3：List of Experimental Equipment and Materials:
Includes a laser, a 2-axis tripod electrothermally actuated MEMS mirror, and a cone mirror. The MEMS mirror uses SiO2 and Al as bimorph materials with Pt as the embedded heater material.
4：Experimental Procedures and Operational Workflow:
The fabrication process involves PECVD SiO2 deposition, Pt lift-off, Al sputtering, and DRIE etch for device release.
5：Data Analysis Methods:
COMSOL is used for simulation of static response and resonant frequencies. Experimental results include static rotation angle versus applied voltage and frequency response measurements.
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