研究目的
Investigating the fabrication and characterization of spherical micro-lenses (μ-lenses) made from PDMS and their integration into optogenetic implants based on μLEDs to improve light extraction efficiency.
研究成果
The mold fabrication described represents a simple and cost-effective way to realize μ-lenses with sizes down to a few 10 μm in diameter. The peak intensity extracted from μ-LED probes was increased by up to 145% implementing PDMS μ-lenses and/or CCs. By implementing CCs, the emission cone of the μLEDs was narrowed by 6°.
研究不足
The study is limited by the tradeoff between circularity and surface quality of the μ-lens cavities, and the anisotropic etch rates in different crystallographic directions depending on the applied HNA concentration.
1：Experimental Design and Method Selection:
The study involves the fabrication of μ-lenses using a reusable silicon mold realized by wet chemical HNA etching and their integration into μLED-based optogenetic implants.
2：Sample Selection and Data Sources:
4-inch silicon wafers with (100) orientation are used as substrates.
3：List of Experimental Equipment and Materials:
Equipment includes a reactive ion etching (RIE) system, SEM for imaging, and a beam profiler for optical characterization. Materials include PDMS, silicon wafers, and HNA etchant.
4：Experimental Procedures and Operational Workflow:
The process involves HNA etching of μ-lens cavities, PDMS molding, and integration of μ-lenses and CCs into μLED probes.
5：Data Analysis Methods:
Optical characterization is performed using a beam profiler to measure light extraction efficiency and peak intensity.
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