研究目的
To propose and demonstrate a high-resolution and fast-response optical waveguide temperature sensor based on asymmetric Mach-Zehnder interferometer (MZI) structure for temperature detections in molecular analysis, biotechnology, and chemical synthesis.
研究成果
The proposed waveguide temperature sensor based on asymmetric MZI structure demonstrates high sensitivity, resolution, and fast response time, making it suitable for applications in chemical and biological analyses.
研究不足
The fabrication process involves multiple steps, which may lead to a long production time and high cost. The sensitivity is dependent on the precision of the fabrication process.
1：Experimental Design and Method Selection:
The sensor is based on an asymmetric MZI structure with two different polymer materials (EpoClad and NOA 73) in the arms to exploit their different thermo-optic coefficients for temperature sensing.
2：Sample Selection and Data Sources:
The sensor's performance was evaluated using a tunable laser and an optical power meter to record output intensity variations in response to temperature changes.
3：List of Experimental Equipment and Materials:
Includes a tunable laser (Santec, TSL-210), optical power meter (ANDO, AQ6317C), temperature control waveguide holder (SURUGA SEIKI F274-18), and temperature controller (ILX lightwave LDT-5525B).
4：Experimental Procedures and Operational Workflow:
The sensor was fabricated using conventional semiconductor processes, including spin-coating, ICP etching, and UV curing. The response to temperature changes was measured by applying a modulating signal to an electrode heater and monitoring the output light intensity.
5：Data Analysis Methods:
The sensitivity and resolution of the sensor were calculated based on the output light intensity variations in response to temperature changes.
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tunable laser
TSL-210
Santec
Used to record the output intensity variations in response to temperature changes.
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optical power meter
AQ6317C
ANDO
Used to record the output intensity variations in response to temperature changes.
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temperature control waveguide holder
F274-18
SURUGA SEIKI
Used to simulate the environmental temperature variation.
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temperature controller
LDT-5525B
ILX lightwave
Used to simulate the environmental temperature variation.
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