研究目的
Investigating the development of efficient L-shaped surface grating couplers with subwavelength grating metamaterials for improved fiber-chip coupling performance.
研究成果
The research successfully demonstrated L-shaped grating couplers with SWG metamaterials achieving low coupling loss and reduced back-reflections, paving the way for robust sub-decibel fiber-chip coupling in commercial nanophotonic foundry settings.
研究不足
The study is constrained by the lithographic and etching complexity within established foundries, and the need for compatibility with existing CMOS processes.
1：Experimental Design and Method Selection:
The study employs L-shaped waveguide radiation profiles and subwavelength grating (SWG) metamaterials for designing uniform grating couplers.
2：Sample Selection and Data Sources:
Devices were designed on SOI substrates with a 300-nm Si layer and 720-nm BOX, operating with TE-like waveguide mode at a wavelength of 1550 nm.
3：List of Experimental Equipment and Materials:
SOI substrates, deep-UV steppers, and CMOS production line facilities.
4：Experimental Procedures and Operational Workflow:
Fabrication involved two lithography and etching procedures, with rigorous 3D FDTD calculations for performance prediction.
5：Data Analysis Methods:
Scanning electron microscopy for device imaging and spectral response analysis for coupling loss and reflectivity measurements.
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