研究目的
To increase the spatial resolution of thermochemical direct laser writing on thin metal films by examining various techniques, effects, and factors, and to find a suitable metal and its thickness for implementing the through-oxidation regime.
研究成果
The nonlinear nature of through-oxidation of metal films, induced by direct laser writing, allows for reducing the width of recorded tracks by about 1.5–3 times. The use of zirconium films and proper adjustment of laser exposure parameters were found to be effective for achieving high spatial resolution. Further reduction of the laser spot size and optimization of focusing systems can enhance the resolution.
研究不足
The tolerance of intensity for the optimal regime is quite narrow, and the formation of laser-induced periodic surface structures (LIPSS) can occur when the beam power is slightly reduced. The choice of film thickness and laser exposure parameters is crucial for eliminating self-induced quasi-periodic structures.
