研究目的
To demonstrate a CMOS-compatible optical phased array powered by a monolithically-integrated erbium laser, enabling manipulation and dynamic control of free-space light with large aperture sizes and fast steering rates.
研究成果
The study successfully demonstrated a CMOS-compatible optical phased array powered by a monolithically-integrated erbium laser, achieving single-mode output and efficient beam steering. This work paves the way for future monolithic silicon-photonics systems.
研究不足
The system's efficiency is limited by the roughness at the bottom of the gain trench and the current design's slope efficiency. Future improvements could include optimizing the oxide cladding recipe and implementing advanced laser designs.
1：Experimental Design and Method Selection:
The study utilized an advanced CMOS-compatible 300-mm-wafer silicon-photonics platform with multiple layers for waveguide, doping, and metal routing. The platform was designed to integrate an erbium-doped laser with an optical phased array.
2：Sample Selection and Data Sources:
The platform was fabricated at CNSE SUNY, and the gain material was deposited at MIT. The system's performance was characterized using optical spectrum analyzers and power meters.
3：List of Experimental Equipment and Materials:
The platform includes silicon and silicon-nitride layers, metal and via layers, and an erbium-doped aluminum-oxide thin film. Characterization equipment included an optical spectrum analyzer and a power meter.
4：Experimental Procedures and Operational Workflow:
The system was optically pumped using a 980-nm-wavelength laser diode, and the output was analyzed for lasing characteristics and beam steering performance.
5：Data Analysis Methods:
The lasing spectrum and beam steering efficiency were analyzed to evaluate the system's performance.
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