研究目的
To discuss the technical hurdles and solutions of the FMM materials and patterning process for high resolution AMOLED displays.
研究成果
The paper concludes that by using thin Invar foil and femtosecond laser system, a UHD grade FMM stick manufacturing process has been developed. The key technologies include mask projection optics, precision scanning stage with electrostatic chuck, and a thermal damage-free process.
研究不足
The paper mentions the challenges in manufacturing thin Invar foil with high flatness and the thermal damages during laser irradiation onto the thin Invar foil.
