研究目的
Investigating the efficiency enhancement of TiOx electron-transporting layer-based ultrathin p-type c-Si solar cell by reactive sputtering of backside MoOx hole-transporting contact.
研究成果
The insertion of MoOx thin film between Ag and p-type c-Si significantly enhances the efficiency of ultrathin c-Si solar cells by improving both electrical and optical performances. The realization of MoOx-based contact at room temperature offers a new way to reduce yield losses and ease wafer bowing during the fabrication of ultrathin c-Si solar cells.
研究不足
The study focuses on the optimization of MoOx thin film properties and its application in ultrathin c-Si solar cells. The scalability of the fabrication process and the long-term stability of the solar cells under operational conditions are not addressed.
1：Experimental Design and Method Selection:
The study employs reactive magnetron sputtering method at room temperature to fabricate MoOx backside hole-transporting layer on TiOx electron-transporting layer-based ultrathin c-Si solar cell. The effects of oxygen ratio and sputtering power on the film phase, bandgap, and surface roughness are investigated.
2：Sample Selection and Data Sources:
p-type Czochralski (CZ) Si wafers with a size of 20 × 20 mm2 were used as substrates. The MoOx thin film was obtained through radio-frequency magnetron sputtering of MoO3 ceramic target.
3：List of Experimental Equipment and Materials:
Equipment includes X-ray diffraction patterns (XRD, Bruker D8 Advance), atomic force microscope (AFM, Zeiss Sigma), scanning electron microscope (SEM, Hitachi S-4800), UV–Vis spectrophotometer (Shimadzu, UV-3600), X-ray photoelectron spectroscopy (XPS, Escalab 250Xi), and Sinton WCT-120 for effective minority carrier lifetime measurement.
4：Experimental Procedures and Operational Workflow:
The MoOx-based ultrathin cell was realized by the deposition of optimized MoOx layer and Ag layer subsequently. The contact performance between Ag and p-type c-Si was systematically studied and optimized by MoOx insertion.
5：Data Analysis Methods:
The performance of the solar cells was evaluated through current density–voltage (J–V) characteristics under simulated AM 1.5G irradiance and external quantum efficiency (EQE) spectra. Optical simulation was achieved by Lumerical finite difference time domain (FDTD) software.
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