研究目的
Investigating the optical properties of diamond-like carbon films prepared by pulsed laser deposition onto 3D surface substrate.
研究成果
The 3D-motional setup successfully deposited uniform DLC films on large curved surfaces, with a deviation of average transmittance below 2.3% in the MIR band. The research demonstrates the potential of PLD technology in optical applications.
研究不足
The theoretical model for thickness distribution was based on ideal conditions, lacking considerations for diffractional particles, spatial errors, and control errors in the 3D-motion.
1：Experimental Design and Method Selection:
A 3D-motional deposition setup was designed to grow uniform DLC films on 3D curved surfaces. The mathematical model of film thickness on the 3D curved surface was deduced.
2：Sample Selection and Data Sources:
Non-doped infrared silicon substrates were used, with small planar substrates forming a fictitious curved surface.
3：List of Experimental Equipment and Materials:
A KrF laser (λ = 248 nm) was used for PLD.
4：Experimental Procedures and Operational Workflow:
The setup drove the curved surface to swing by variational angular velocity and rotate by changeless angular velocity.
5：Data Analysis Methods:
Raman spectroscopy and Fourier transform spectroscope were used to measure the properties of the DLC films.
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