摘要： The iron doped tungsten-oxide (Fe and WO3) thin ?lm with di?erent morphology and crystalline structures were obtained for di?erent substrate temperatures at the oxygen pressure of 14.66 Pa. The Fe-doped WO3 ?lms were deposited by pulsed laser deposition (PLD). The in?uence of the substrate temperature on the surface and on the crystalline phases of the ?lms was studied. The XRD (X-ray di?raction) analysis indicates the changing in the crystalline phases from γ-monoclinic to a mixture of γ-monoclinic and hexagonal phases dependent on the temperature of annealing and as-grown ?lms. Related to the as-grown and annealing ?lms conditions, the SEM (scanning electron microscopy) shows a change in the image surface from nanoneedles, to nanoporous, and further to long nanowires and broad nanobands. Energy-dispersive X-ray spectroscopy (EDX) shows the elemental composition of the Fe-doped WO3 ?lm as-grown and after annealing treatment. Raman spectroscopy presented the main vibration mode of the Fe-doped WO3 thin ?lm. The optical energy bandgap of the ?lms is decreasing as the substrate temperature increases.