研究目的
To investigate a micro temperature sensor with micro ring resonator and graphene material for controlling the temperature of the system by the layer of graphene on micro ring resonator path, achieving high sensitivity, finesse, and small dimensions.
研究成果
The micro optical temperature sensor with graphene on micro ring resonator paths shows acceptable results with high sensitivity and finesse. The materials used are strong dielectric types found in nature with very high sensitivity and melting points. The system demonstrates sharp sensitivity to temperature increases, making it suitable for industrial, engineering, and medical applications.
研究不足
The study focuses on a specific frequency range (50-55 THZ) and temperature range (350-400 K). The sensor's performance in other ranges or under different conditions is not explored.
1：Experimental Design and Method Selection:
The simulation of the system is based on description, design, and analysis with CST STUDIO SUITE software in 3D and normal environment and open boundary conditions. This software has the mesh system which analyzes the sensor in very small cells to reach accurate results.
2：Sample Selection and Data Sources:
The materials of the sensor are Si and SiO2, with graphene used for its high thermal conductivity and sensitivity.
3：List of Experimental Equipment and Materials:
Micro ring resonator with graphene, Si, and SiO2 materials.
4：Experimental Procedures and Operational Workflow:
The system is designed with a substrate of 4 micrometers thickness, diameter of the ring is 30 μm, and the gap between waveguide and ring is 0.6 μm. The length, width, and height of the dielectric bus waveguide are 44, 1.35, and 0.75 μm respectively.
5：6 μm. The length, width, and height of the dielectric bus waveguide are 44, 35, and 75 μm respectively.
Data Analysis Methods:
5. Data Analysis Methods: The analysis includes measuring FSR, FWHM, finesse, time delay, and time rotation to evaluate the sensor's performance.
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