研究目的
To develop an electron source with stable and long lifetime electron emission for a miniaturized MEMS-type transmission electron microscope (TEM).
研究成果
The developed CNT planar cathodes demonstrate stable and long lifetime electron emission (up to 45 hours) without the need for fillers or post-process treatment. This advancement is significant for the application of CNT cathodes in on-chip vacuum devices, particularly miniaturized TEMs.
研究不足
The emission current during the lifetime test was in the microamperes range, which is lower than the current measured during V-I tests. This suggests potential fatigue effects or other factors affecting long-term performance.
1：Experimental Design and Method Selection:
The study focuses on developing a planar cathode using a commercial CNT ink for field emission applications in miniaturized TEMs. The methodology involves the fabrication of CNT cathodes on Si or glass substrates compatible with MEMS technology.
2：Sample Selection and Data Sources:
Seven samples (s1-s7) were prepared using a commercial CNT ink (0.2 wt.-% in H2O, single wall type, OCSiAl, RU) placed on a silver layer to enhance attachment to the Si substrate.
3：2 wt.-% in H2O, single wall type, OCSiAl, RU) placed on a silver layer to enhance attachment to the Si substrate.
List of Experimental Equipment and Materials:
3. List of Experimental Equipment and Materials: High vacuum chamber (~10?5 mBar), DC voltage source, phosphor screen for luminescent imaging, and borosilicate glass as an isolating spacer.
4：Experimental Procedures and Operational Workflow:
The cathodes were tested in a two-electrode vertical configuration under high vacuum conditions. Voltage-current (V-I) characteristics and time-current (t-I) measurements were conducted to evaluate performance and lifetime.
5：Data Analysis Methods:
Analysis of V-I characteristics to determine threshold voltage and emission current level, and t-I measurements to assess cathode stability and lifetime.
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