研究目的
To demonstrate a robust method to engineer microdisk and microring resonators containing the GeV color centers from single crystal diamond membranes.
研究成果
The study successfully demonstrated a robust method to engineer optically-active, single crystal diamond membranes containing ensembles of GeV emitters and utilized these membranes to produce microdisk and microring cavities with Q values of ~1500. This approach is promising for the realization of diamond integrated quantum nanophotonic circuits on a chip.
研究不足
The losses in the photonic resonators occur due to increased roughness from the imperfect HSQ mask removal and from the leakage to the underlying SiO2 substrate.
1：Experimental Design and Method Selection:
The study employs a lift-off technique to generate single crystal diamond membranes and performs chemical vapour deposition in the presence of a germanium source for in-situ doping.
2：Sample Selection and Data Sources:
Diamond membranes were generated using ion implantation and lift-off, transferred onto a sapphire substrate using a liquid droplet of germanium dioxide powder.
3：List of Experimental Equipment and Materials:
Microwave plasma chemical vapor deposition (MPCVD) chamber, metallic germanium, hydrogen/methane gas mixture, Inductively Coupled Plasma - Reactive Ion Etching (ICP-RIE) system.
4：Experimental Procedures and Operational Workflow:
The membranes were overgrown in a MPCVD chamber with a germanium source, then thinned by ICP-RIE to remove the original material.
5：Data Analysis Methods:
Photoluminescence measurements were recorded under a continuous-wave 532 nm laser excitation at room and cryogenic temperatures using a standard confocal microscope.
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