研究目的
Investigating the influence of Al/Cu thickness ratio and deposition sequence on the photoelectric property of ZnO/Al/Cu/ZnO multilayer film on PET substrate prepared by RF magnetron sputtering.
研究成果
The ZnO/Al6/Cu2/ZnO multilayer film exhibited the optimal overall photoelectric property with a sheet resistance of 108 Ω/sq and an average visible transmittance of 84.73%. The deposition sequence of Al and Cu layers has little influence on the photoelectric properties. These findings suggest that ZnO/Al/Cu/ZnO multilayer flexible films have great potential in various optoelectronic applications.
研究不足
The study is limited by the specific thickness ratios and deposition sequences tested, and the room temperature deposition process may not be optimal for all applications.
1：Experimental Design and Method Selection:
ZnO/Al/Cu/ZnO multilayer films were deposited on flexible PET substrates by RF magnetron sputtering. The overall thickness of the intermediate Al and Cu metal layers was maintained at 8 nm with four different Al/Cu thickness ratios (7:1, 6:2, 5:3, and 4:4).
2：4).
Sample Selection and Data Sources:
2. Sample Selection and Data Sources: The samples included ZnO single-layer film, ZnO/Al8/ZnO, ZnO/Cu8/ZnO, and ZnO/Cu2/Al6/ZnO multilayer films for comparison.
3：List of Experimental Equipment and Materials:
RF magnetron sputtering deposition system, zinc oxide target (99.99% purity), metal Cu target (99.995% purity), metal Al target (99.999% purity), PET substrates.
4：99% purity), metal Cu target (995% purity), metal Al target (999% purity), PET substrates.
Experimental Procedures and Operational Workflow:
4. Experimental Procedures and Operational Workflow: The films were deposited at room temperature with specific sputtering powers for each layer (100 W for ZnO, 30 W for Cu, and 150 W for Al). The thicknesses were controlled by a rate and thickness monitor.
5：Data Analysis Methods:
The surface morphology was observed by FE-SEM, phase composition by EDS, sheet resistance by a digital four-point probe tool, and optical transmittance by a spectrophotometer.
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