研究目的
To demonstrate a cavity optomechanical sensor capable of detecting incident radiation via absorption and resulting photothermally-induced frequency shifts of the nanomechanical oscillator.
研究成果
The cavity optomechanical photothermal sensor demonstrates highly-sensitive absorption measurement, suggesting potential applications in chemical sensing, bolometry, and imaging.
研究不足
The mechanical resonances exhibit strong damping due to the small separation between the waveguide and NEMS oscillator, requiring measurements to be performed in vacuum.
1:Experimental Design and Method Selection:
The experiment involves the use of a microring resonator whose evanescent optical field overlaps with a NEMS oscillator. The setup includes pulsed pump-probe measurements to actuate and measure the NEMS mechanical resonances.
2:Sample Selection and Data Sources:
The devices are fabricated from LPCVD Si3N4 on a thermal oxide layer on a silicon substrate. NEMS oscillators are post-processed onto the microring optical cavity.
3:List of Experimental Equipment and Materials:
Includes a network analyzer, CW laser, PM-coupler, 100x-NIR objective, bandpass filter, and photodetector.
4:Experimental Procedures and Operational Workflow:
The sample is placed in a custom vacuum cell. A pump laser is tuned to a cavity mode, and a CW probe laser is slightly-detuned to the 3 dB-point of a different cavity mode. The pump and probe are combined and focused into the device, and the probe is collected and measured after passing through the device.
5:Data Analysis Methods:
The NEMS displacement amplitude and optical power coupled to the device are analyzed to confirm actuation due to gradient optical forces.
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network analyzer
Used to modulate the pump, which is tuned to a cavity mode.
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CW laser
Serves as the probe and is slightly-detuned to the 3 dB-point of a different cavity mode.
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PM-coupler
70/30
Combines the pump and probe lasers.
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100x-NIR objective
Focuses the combined pump and probe into the device and collects them after passing through the device.
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bandpass filter
BPF
Filters the pump so that only the probe is measured by the photodetector.
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photodetector
Det
Measures the probe, which is modulated by the NEMS motion.
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