研究目的
To develop a technology for parallel integration of thousands of microspheres with the pixels of mid-wave infrared (MWIR) focal plane arrays (FPAs) to enhance sensitivity and reduce dark current.
研究成果
The technology of assembling microspheres in ordered arrays using air suction grippers through microhole arrays can reduce the concentration of defects below ~1%. Further improvements could potentially lower defect rates to ~0.1%, especially with larger microspheres (>100 microns).
研究不足
The study identifies the need for further research to determine the true limitations of the method, particularly in reducing surface charging or other mechanisms of interaction of microspheres to achieve better ordered arrays.
1：Experimental Design and Method Selection:
The study focuses on the assembly of microspheres in ordered arrays using air suction grippers through microhole arrays to reduce the concentration of defects.
2：Sample Selection and Data Sources:
Utilizes microspheres with diameters ranging from several tenths to over 100 microns.
3：List of Experimental Equipment and Materials:
Includes microhole arrays fabricated by photolithography followed by etching techniques, and microspheres made of soda-lime glass and barium titanate glass.
4：Experimental Procedures and Operational Workflow:
Involves the assembly of microspheres into arrays, evaluation of fabrication errors, and analysis of defect rates.
5：Data Analysis Methods:
Examines the concentration of defects in large-scale arrays and the impact of microsphere size on defect rates.
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