研究目的
To develop thermal kinetic inductance detectors (TKIDs) suitable for X-ray spectroscopy measurements, aiming to implement MKIDs sensors working in thermal quasi-equilibrium mode to detect X-ray photons as pure calorimeters.
研究成果
The project aims to develop scalable and resolving X-ray detectors for various scientific disciplines. The first phase focuses on single-pixel optimization, with future plans to implement the best performing resonator configuration in a larger array.
研究不足
The resolution achieved with TKID was limited by saturation effect due to not optimized coupling between the thermal bath and the detector. A better thermal design could improve this value.
1:Experimental Design and Method Selection:
The project involves the development of TKIDs with microresonators built in Ti/TiN multilayer technology, focusing on optimizing single-pixel design for superconducting critical temperatures, internal quality factors, kinetic inductance, and spectral energy resolution.
2:Sample Selection and Data Sources:
The study uses superconducting resonators coupled with a metal absorber on a suspended SiN membrane.
3:List of Experimental Equipment and Materials:
Includes Ti/TiN multilayer films, gold absorbers, and SiN membranes.
4:Experimental Procedures and Operational Workflow:
Fabrication involves deposition of silicon nitrate membrane, multilayer film deposition, lithography, and bulk silicon etching.
5:Data Analysis Methods:
Simulations and characterizations are performed to evaluate resonator performance.
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