研究目的

To investigate the microstructures and the characters of produced films by the analysis of X-ray diffractometry, ratio of sp3/sp2 by Raman spectroscopy and X-ray photoelectron spectroscopy. Some fundamental mechanical properties such as hardness and friction coefficient were also reported in the observation.

研究成果

Amorphous carbon films were successfully produced by magnetron sputtering using woodceramics as target materials. The films were composed of a turbostratic structure or amorphous carbon whose carbon electron configurations were sp2 and sp3. The ratio of sp3 bonding was about 53 % before etching by argon ions, but it increased to 82 % after treatment to the surface layer by etching process. The maximum Vickers hardness and the dynamic friction coefficient measured was 11.87 GPa and 0.25 respectively.

研究不足

The films were unstable and failed easily after 8 minutes because of how thin the films were. The result of the friction coefficient was higher than theory and literatures reported of amorphous carbon film.