研究目的
Investigating the mechanism of few-layer graphene growth on cubic-SiC/Si(001) substrates and controlling the thickness of the graphene overlayer during synthesis.
研究成果
The study successfully demonstrates the controllable synthesis of mono-, bi-, and trilayer graphene on β-SiC/Si(001) wafers using in-situ micro-spectroscopic techniques. The results provide reference data for distinguishing between different graphene layer thicknesses using XPS techniques and highlight the role of the c(2×2) reconstruction and linear defects in the formation of nanostructured graphene.
研究不足
The study focuses on the growth mechanism and control of graphene thickness on β-SiC/Si(001) substrates, but the applicability to other substrates or under different conditions is not explored. The uniformity of graphene coverage on millimeter-scale surface areas could be affected by local temperature variations during synthesis.
1：Experimental Design and Method Selection:
The study combines high-resolution micro-spot X-ray photoemission spectroscopy (μ-XPS), angle-resolved photoelectron spectroscopy (μ-ARPES), low-energy electron microscopy (LEEM), and micro low-energy electron diffraction (μ-LEED) to control the thickness of the graphene overlayer on the silicon carbide substrate in-situ during high-temperature UHV synthesis.
2：Sample Selection and Data Sources:
Cubic-SiC thin films with a thickness of ~1 μm grown on on-plane Si(001) wafers were used.
3：List of Experimental Equipment and Materials:
SPELEEM at the Nanospectroscopy beamline of the Elettra synchrotron, STM (GPI-300 and Createc microscopes), W[111] and W[001] tips for STM.
4：Experimental Procedures and Operational Workflow:
The samples were annealed in UHV, followed by Si-atom sublimation and high-temperature surface graphitization. The surface structure was monitored by μ-LEED and μ-XPS after each consecutive flash heating cycle.
5：Data Analysis Methods:
The C 1s spectra were decomposed into individual components corresponding to different carbon atom chemical bonds using CasaXPS data processing software.
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