研究目的
To develop and investigate two cascade arc plasma sources for application to plasma windows for virtual vacuum interfaces, focusing on their performance in generating steep pressure gradients and their characteristics through emission spectroscopy.
研究成果
Two cascade arc plasma sources were successfully developed for plasma window applications, demonstrating significant pressure gradients and providing detailed plasma characteristics through emission spectroscopy. The 3-mm arc achieved a pressure ratio of 103, while the 8-mm arc showed potential for replacing differential pumping stages in specific applications.
研究不足
The maximum discharge current for the 3-mm cascade arc is restricted by the water-cooling capacity of the electrodes, limiting the achievable plasma density. The performance of the 8-mm cascade arc as a plasma window is modest compared to the 3-mm arc due to less effective gas friction and higher gas conductance.
1：Experimental Design and Method Selection
Two cascade arc plasma sources were developed: a compact arc discharge source with a 3-mm channel diameter for Ar thermal plasma generation and a larger arc device with an 8-mm diameter for He plasma generation. The performance of these sources as plasma windows was investigated through pressure gradient measurements and emission spectroscopy.
2：Sample Selection and Data Sources
High-purity Ar and He gases were used for generating plasmas in the respective discharge sources. Emission spectroscopy was conducted to analyze the plasma characteristics.
3：List of Experimental Equipment and Materials
Cascade arc discharge apparatuses with 3-mm and 8-mm channel diameters, CeW cathode, LaB6 cathode, Mo intermediate electrodes, W anode, spectrometers (Acton Spectra Pro 2500i, Jobin Yvon HR1000, Acton Research Corporation VM-521), back-illuminated CCD cameras, X-ray CCD cameras.
4：Experimental Procedures and Operational Workflow
Arc discharges were initiated with a glow discharge, transitioning to cascade arc discharge. Pressure gradients through the discharge channels were measured. Emission spectroscopy was performed at visible and vacuum UV wavelengths to analyze plasma parameters.
5：Data Analysis Methods
Spectral analysis included the Boltzmann plot method for electron temperature determination and Stark broadening theory for electron density evaluation. Continuum radiation analysis was also performed for temperature estimation.
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