研究目的
Investigating the fabrication and application of MEMS piezoelectric accelerometers for health monitoring of mechanical motors.
研究成果
The MEMS piezoelectric accelerometer via modified sol-gel method was successfully fabricated. The optimized thick films had better electric properties than films deposited by traditional sol-gel method. The modified math theory using the effective thickness of Si membrane was proposed to estimate the resonant frequency more accurately. The self-made accelerometer with amplifier and package box could successfully be applied to detect the health condition of mechanical motors.
研究不足
The process of back etching was rough and no vertical profile, leading to a curved profile that affected the resonant frequency. The inner and outer height difference of Si diaphragm was up to 20μm, which changed the neutral axis of structure.
1：Experimental Design and Method Selection:
The study used a modified sol-gel method to fabricate PZT thick films on Pt-coated Si substrates. A mathematic approximation model was proposed to estimate the resonant frequency more accurately.
2：Sample Selection and Data Sources:
PZT-5A submicron powders were used, and the films were characterized using various techniques.
3：List of Experimental Equipment and Materials:
Equipment included an Impedance analyzer, precision ferroelectric tester, and atomic force microscope. Materials included PZT sol-gel solution and Pt-coated Si substrates.
4：Experimental Procedures and Operational Workflow:
The process involved preparing PZT thick films, designing and fabricating MEMS accelerometers, and testing their properties.
5：Data Analysis Methods:
The resonant frequency and sensitivity of the accelerometers were analyzed and compared with theoretical models and experimental data.
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