研究目的
To design and characterize ultra-thin amorphous Si nanopillar arrays for polarization-independent, narrowband spectral filtering in the near-infrared for hyperspectral imaging applications.
研究成果
The ultra-thin a-Si nanopillar arrays exhibit high-efficiency, narrowband reflectivity peaks due to guided mode resonances, are polarization-independent, and offer passive tunability through geometric modifications, making them advantageous for compact hyperspectral imaging devices with minimal material loss.
研究不足
Experimental imperfections such as refractive index differences between simulation models and fabricated devices, inaccuracies in AFM measurements due to fabrication complexities, and potential material absorption at certain wavelengths.
1:Experimental Design and Method Selection:
The study combines experiments, simulations (FDTD), and theory (guided mode resonance formalism) to analyze optical properties.
2:Sample Selection and Data Sources:
Fabricated a-Si nanopillar arrays with varying geometries (radius, spacing, height) on glass substrates.
3:List of Experimental Equipment and Materials:
Used electron-beam lithography (EBL), inductively coupled plasma reactive ion etching (ICP-RIE), plasma-enhanced chemical vapor deposition (PECVD) for fabrication; scanning electron microscope (SEM), atomic force microscopy (AFM), Fianium white light source, monochromator, Ge photodetectors for measurements; Lumerical FDTD for simulations.
4:Experimental Procedures and Operational Workflow:
Fabrication involved depositing a-Si, patterning with EBL and ICP-RIE, encapsulating with SiO2, planarizing; reflection measurements were taken at normal incidence with normalization to a silver mirror.
5:Data Analysis Methods:
Reflectivity calculated using intensity ratios; simulations used boundary conditions and mesh overrides; band diagrams generated to predict resonance locations.
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Raith 5200
5200
Raith
Electron beam writer for patterning
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Lumerical FDTD
Lumerical
Commercial electromagnetics software for simulations
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Fianium white light source
Fianium
Light source for reflection measurements
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Ge photodetector
Detector for measuring light intensity
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Scanning electron microscope
Imaging of nanopillar arrays
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Atomic force microscope
Measuring nanopillar profiles
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ICP-RIE system
Etching for pattern transfer
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PECVD system
Deposition of a-Si and SiO2
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