研究目的
To review and classify methods of fabrication of MEMS alkali vapor cells for chip-scale atomic clocks, discussing their advantages and disadvantages.
研究成果
The review concludes that on-chip dispensing using solid-state dispensers is the most promising method for MEMS alkali vapor cells due to its compatibility with batch fabrication, controlled alkali vapor release, and good metrological parameters. Other methods have specific drawbacks, and future improvements may involve integrating micropumps for better vacuum control.
研究不足
The review highlights limitations of various fabrication methods, such as incompatibility with MEMS technology for mass production, issues with long-term stability, contamination risks, and challenges in achieving high vacuum or precise control. It also notes that some methods are not fully developed or widely applied industrially.
