1：Experimental Design and Method Selection:

Aerosol Assisted Chemical Vapor Deposition (AACVD) was used to synthesize thin films on silica glass substrates at 400 °C, with precursor solutions of tungsten hexacarbonyl and multiwalled carbon nanotubes (MWCNT) in toluene. The method was chosen for its simplicity, scalability, and ability to produce uniform films.

2：Sample Selection and Data Sources:

Silica glass substrates coated with SiO2 layer (Pilkington NSG) were used. Precursor concentrations varied as per Table 1 in the paper, with MWCNT doping levels from 0% to 0.35%.

3：35%. List of Experimental Equipment and Materials:

3. List of Experimental Equipment and Materials: Equipment includes an AACVD reactor, ultrasonic humidifier, magnetic stirrer, nitrogen gas supply, and characterization tools: Scanning Electron Microscopy (SEM), Energy Dispersive X-ray Spectroscopy (EDX), X-ray Diffractometry (XRD), Fourier Transform Infrared (FTIR) spectroscopy, UV-VIS-NIR spectrometer, and four-point probe. Materials: tungsten hexacarbonyl (99%, Aldrich), MWCNT (>95%, Aldrich), toluene (>99.6%, Sigma-Aldrich), nitrogen gas (99.9%, BOC), silica glass substrates.

4：6%, Sigma-Aldrich), nitrogen gas (9%, BOC), silica glass substrates. Experimental Procedures and Operational Workflow:

4. Experimental Procedures and Operational Workflow: Precursor solutions were prepared and stirred for homogeneity. Aerosol was generated using an ultrasonic humidifier and transported by nitrogen gas to the reactor. Substrates were cleaned ultrasonically with acetone and deionized water. Deposition was carried out at 400 °C for 1.5 hours. Post-deposition, films were characterized using SEM, EDX, XRD, FTIR, UV-VIS spectroscopy, and four-point probe measurements.

5：5 hours. Post-deposition, films were characterized using SEM, EDX, XRD, FTIR, UV-VIS spectroscopy, and four-point probe measurements. Data Analysis Methods:

5. Data Analysis Methods: XRD data analyzed for crystal structure and phase using Scherrer equation and texture coefficient. FTIR spectra analyzed for vibrational modes. UV-VIS data used Tauc plots to determine band gap energies. Electrical resistivity calculated from four-point probe measurements using standard formulas.