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Fabrication, Modelling and Assessment of Hybrid 1-D Elastic Fabry Perot Microcavity for Mechanical Sensing Applications

DOI:10.1016/j.ceramint.2019.01.083 期刊:Ceramics International 出版年份:2019 更新时间:2025-09-23 15:22:29
摘要: 1-D multilayer dielectric films consisting of seven pairs of SiO2 and TiO2 alternating layers are deposited on a SiO2 substrate using the radio frequency sputtering technique. The thicknesses of the film layers are chosen to reflect the visible radiation around 650 nm. An elastic microcavity layer made of Polydimethylsiloxane was sandwiched between two Bragg reflectors. A fabrication process was then developed for elastic microcavity in order to tailor the thickness, establish the surface planarity and to increase reproducibility of the samples. Optical transmittance of the single Bragg reflector and the microcavity were both simulated and measured. A comparison between measurement data and Transfer Matrix Method calculations shows a favourable correlation. Furthermore, in order to assess the suitability of the microcavity as a force sensor, transmittance measurements were carried out as a function of the applied forces. The change in the elastic microcavity thickness due to applied forces resulted in cavity resonance peak shifts proportional to the applied forces.
作者: Osman Sayginer,Alessandro Chiasera,Lidia Zur,Stefano Varas,Lam Thi Ngoc Tran,Cristina Armellini,Maurizio Ferrari,Oreste S. Bursi
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To design, simulate, fabricate, and assess a hybrid 1-D elastic Fabry-Perot microcavity for mechanical sensing applications, focusing on its response to applied forces.

The hybrid 1-D elastic Fabry-Perot microcavity was successfully fabricated and shown to function as a mechanical sensor, with optical response shifts proportional to applied forces due to changes in cavity thickness and refractive index. The study demonstrates good agreement between simulations and measurements, but highlights the influence of PDMS viscoelasticity on sensor performance, suggesting areas for future optimization in material properties and design.

The fabrication process may have reproducibility issues; the PDMS layer exhibits viscoelastic properties affecting recovery after force removal, and the force-response relationship is not linear, indicating potential non-ideal behavior for precise sensing applications. Alignment and mechanical fragility in optical systems could pose challenges.

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