研究目的
To design, simulate, fabricate, and assess a hybrid 1-D elastic Fabry-Perot microcavity for mechanical sensing applications, focusing on its response to applied forces.
研究成果
The hybrid 1-D elastic Fabry-Perot microcavity was successfully fabricated and shown to function as a mechanical sensor, with optical response shifts proportional to applied forces due to changes in cavity thickness and refractive index. The study demonstrates good agreement between simulations and measurements, but highlights the influence of PDMS viscoelasticity on sensor performance, suggesting areas for future optimization in material properties and design.
研究不足
The fabrication process may have reproducibility issues; the PDMS layer exhibits viscoelastic properties affecting recovery after force removal, and the force-response relationship is not linear, indicating potential non-ideal behavior for precise sensing applications. Alignment and mechanical fragility in optical systems could pose challenges.
1:Experimental Design and Method Selection:
The study involved designing a Bragg reflector with SiO2 and TiO2 layers using the quarter-wave approach for operation at 650 nm, fabricating it via RF sputtering, and developing a process for an elastic PDMS microcavity sandwiched between two Bragg reflectors. Optical transmittance was simulated using the Transfer Matrix Method (TMM) and measured with a spectrophotometer. Mechanical testing under compression forces was conducted to evaluate sensing capabilities.
2:Sample Selection and Data Sources:
Silica substrates were used for deposition. Samples included single Bragg reflectors and sandwich structures with PDMS cavities. Data came from optical measurements and simulations.
3:List of Experimental Equipment and Materials:
Equipment included an RF sputtering system with silica and titania targets, quartz microbalances (Veeco Instruments QM311), Varian Cary mod.5000 spectrophotometer, and a custom compression setup with tunable springs and parallel plates. Materials included SiO2, TiO2, Sylgard 184 Silicone Elastomer (PDMS), and curing agent.
4:Experimental Procedures and Operational Workflow:
For Bragg reflector fabrication, substrates were cleaned, heated to 120°C, and layers deposited via RF sputtering with monitored rates. For the microcavity, PDMS was mixed, applied, pressed with weight, cured at 80°C, and cleaned. Optical characterization involved transmittance measurements from 400-900 nm. Mechanical testing applied forces (20N, 80N, 100N) using the compression setup while measuring transmittance.
5:Data Analysis Methods:
TMM simulations with wavelength-dependent refractive indices were used for optical response prediction. Cavity thickness was estimated from transmission spectra using a derived equation. COMSOL Multiphysics software simulated mechanical deformations. Data comparison between measurements and simulations was performed to assess correlation.
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