研究目的
Investigating the performance of a 25 μm AlGaN-based micro-piezoelectric transducer under high voltage excitation and its potential for ultrasound imaging applications.
研究成果
The 25 μm AlGaN-based MPT demonstrates effective performance under high voltage with potential for high-resolution ultrasound imaging, but nonlinear behavior at higher powers and material constraints need consideration for future applications.
研究不足
The study is limited to specific material thicknesses and array configurations; scalability to larger arrays or different materials may require further optimization. Nonlinear effects at high power may affect linear operation ranges.
1：Experimental Design and Method Selection:
The experiment involved fabricating a micro-piezoelectric transducer array on a silicon-on-insulator substrate and characterizing its electrical and vibrational properties under high voltage excitation. Methods included electrical impedance measurements and laser Doppler vibrometry.
2：Sample Selection and Data Sources:
The sample was a fabricated MPT array with 23×28 elements on a SOI substrate with 1 μm AlGaN thin film on a 24 μm silicon membrane.
3：List of Experimental Equipment and Materials:
Equipment included a laser Doppler vibrometer (LDV) for vibration measurements and sources for high voltage excitation. Materials included AlGaN, silicon, and SOI substrates.
4：Experimental Procedures and Operational Workflow:
The MPT was excited with high voltage, and electrical impedance was measured in air and water. Vibration modes were characterized using LDV, and nonlinear behavior was observed at higher power inputs.
5：Data Analysis Methods:
Data analysis involved impedance spectroscopy, vibration amplitude measurement, and resonance frequency determination using LDV and electrical measurements.
独家科研数据包，助您复现前沿成果，加速创新突破
获取完整内容
