1：Experimental Design and Method Selection:

The study uses an alternating layer structure of PEALD-based Al2O3 and sol-gel derived O-I nanohybrid layers. PEALD is chosen for precise inorganic layer deposition, and sol-gel method for O-I layers to leverage chemical bonding and flexibility.

2：Sample Selection and Data Sources:

Substrates include PEN and glass. O-I nanohybrid sols are synthesized using specific precursors. Calcium test cells are prepared for WVTR measurements.

3：List of Experimental Equipment and Materials:

Equipment includes PEALD reactor (LTSR-150, Leintech), TEM (JEOL JEM 2100F), AFM (VEECO Dimension 3100), UV-Vis spectrometer (V-670, Jasco), ellipsometer (M-2000, J.A. Woollam), bending machine, and thermal evaporator. Materials include TMA, IPDI, glycerol, APTES, PEG, DBTDL, GPTMS, PTMS, TTIP, ethanol, HCl, Ca, Al, PEN substrates, glass substrates, and UV-curable sealant (XNR 570-B1, Nagase ChemteX).

4：Experimental Procedures and Operational Workflow:

Clean substrates, deposit Al2O3 via PEALD with specific timing cycles, spin-coat O-I nanohybrid sols, cure, prepare Ca test cells, encapsulate, measure conductance changes under accelerated aging, and characterize using TEM, AFM, OM, UV-Vis, ellipsometry, bending tests, and immersion tests.

5：Data Analysis Methods:

WVTR calculated from Ca test data using specific equations, activation energy determined from Arrhenius plot, optical transmission measured, surface roughness analyzed via AFM, and crack density observed via OM.