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Geometric parameters effect of the atomic force microscopy smart piezoelectric cantilever on the different rough surface topography quality by considering the capillary force
摘要： Nowadays, the atomic force microscopy (AFM) is widely used in the nanotechnology as a powerful nano-robot. The surface topography in Nanoscale is by far one of the most important usages of the AFM device. Hence, in this article, the vibration motion of a piezoelectric rectangular cross-section micro-cantilever (MC) which oscillates in the moist environment has been examined based on the Timoshenko beam theory. After extracting the MC governing equations according to Hamilton's principle, the finite element method has been used to discretize the motion equations. The surface topography has been simulated for various roughness forms in the tapping and non-contact modes by considering the effects of the Van der Waals, capillary and contact forces. Also, the experimental results obtained from the glass surface topography have been simulated. The results illustrate that the time delay in higher natural frequencies in the tapping mode is shorter in comparison with the non-contact mode, especially, for the lower natural frequencies. The sensitivity analysis of the natural frequencies, topography depth and time delay have been simulated. Results indicate that the most effective parameter is the MC length. In the first mode, the first section length has the highest effect on the surface topography time delay, also, in the second vibration mode; the most effective parameter on the time delay is the MC tip length based on the simulation results.
关键词： AFM piezoelectric micro-cantilever,Timoshenko beam,sensitivity analysis,finite element method,topography depth
更新于2025-09-23 15:23:52
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A distributed parametric model of Brinson shape memory alloy based resonant frequency tunable cantilevered PZT energy harvester
摘要： This paper presents, an analytical model of piezoelectric vibration energy harvester consists of Brinson shape memory alloy (SMA) plate which can tune the resonant frequency. As the energy harvester should be tuned to excitation frequency in order to drive the maximum power, the temperature of SMA is varied to tune the natural frequency of the composite beam. In addition to SMA it also consists of piezoelectric layer and substructure layer. Using Euler–Bernoulli beam assumption, the expressions for frequency response of voltage, current and power outputs with temperature are obtained. From parametric study, it is observed that the tuning of natural frequency is 25–26%, for first three modes of vibration in short and open circuit conditions.
关键词： PZT,Energy harvester,Shape memory alloy,Tunable,Cantilever
更新于2025-09-23 15:22:29
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[IEEE 2017 IEEE Workshop on Recent Advances in Photonics (WRAP) - Hyderabad (2017.12.18-2017.12.19)] 2017 IEEE Workshop on Recent Advances in Photonics (WRAP) - Differential Pressure Sensor Using Integrated Optical MEMS and Double Ring Resonator
摘要： In this work, we designed and simulated a differential pressure sensor using a double ring resonator with radius 5μm and 4μm placed on the fixed of a cantilever beam with dimensions 100μm x 30μm x 5μm. The stress induced on the cantilever changes the refractive index in the waveguide which results in the shift of the resonant wavelength. A sensitivity of 15.544pm/kPa is achieved. The sensor is operated at wavelength equal to 1.55μm and can be used for aircraft, medicine and automobile.
关键词： Cantilever beam,Opto-mechanical effect,Differential pressure sensor,Double ring resonator
更新于2025-09-23 15:22:29
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Mass measurement of grasped object with tweezers employing bimorph piezoelectric actuators
摘要： This paper deals with tweezers for a mass detection during micromanipulation. It measures 52 mm×30 mm×10 mm and weighs 37 g. Each ?nger consists of a bimorph piezoelectric actuator with a stainless steel tip. One of the tweezers working as a vibrator was oscillated at its resonance frequency, and another working as a grasper opened and closed the gap between the tips of the bimorph piezoelectric actuators. The simulation model that represents the contact of two beams and a lumped mass as springs was described. The resonance frequency was increased when the tweezers grasped an object. The relationship between the mass of the object and frequency was obtained experimentally. Because the charge generated by the piezoelectric effect also affected the resonance frequency, the frequency change in the experiments was smaller than that in the simulation.
关键词： resonance frequency,mass evaluation,cantilever,Piezoelectric actuator,vibration
更新于2025-09-23 15:22:29
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Energy harvesting properties of the functionally graded flexoelectric microbeam energy harvesters
摘要： Flexoelectricity may be an excellent candidate for piezoelectricity in micro and nano scaled energy harvesters due to its strong size dependency. In this paper, a size dependent analytical model of the cantilever-based functionally graded flexoelectric energy harvesters is developed. The Hamilton’s principle is used to derive the governing equations. By means of the Galerkin’s method, the approximated closed-form solutions of electrical output and energy conversion efficiency are obtained. For the functionally graded flexoelectric energy harvester, the effective flexoelectric response is controlled by not only the flexocoupling coefficient but also its first derivative. Numerical results of a 3μm-thick Polyvinylidene Fluoride/ Strontium Titanate composed functionally graded flexoelectric energy harvester demonstrate that when the volume fraction exponent varies from zero to infinity, the optimal working frequency gradually reduces from 41407Hz to 7761Hz and the optimal load resistance gradually increases from 0.99MΩ to 83.91 MΩ. Meanwhile, shrinking the thickness from 3μm to 0.3μm will highly increase the normalized power density and the energy conversion efficiency about one and two orders, respectively. Moreover, when the strain gradient elastic coefficient becomes larger, the natural frequency will increase while the corresponding maximum electrical output will decrease.
关键词： Functionally graded materials,Flexoelectric effect,Cantilever beam,Strain gradient elastic effect,Energy harvesters
更新于2025-09-23 15:22:29
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A Complete System Modelling of Piezoelectric Energy Harvester (PEH) with Silicon Carbide (SiC) Used as Cantilever Base
摘要： Silicon carbide (SiC) is a material that possesses hardness and robustness to operate under high temperature condition. This work is a pilot in exploring the feasibility of cubic piezo element on the SiC wafer with integrated proof mass as horizontal cantilever with perpendicular displacement with respect to the normal plane. With the advance of electronic circuitry, the power consumption is reduced to nano-watts. Therefore, harvesting ambient energy and converting into electrical energy through piezoelectric material will be useful for powering low power devices. Resonance is a property which able to optimize the generated output power by tuning the proof masses. The damping ratio is a considerable parameter for optimization. From analytical study, small damping ratio will enhance the output power of the piezoelectric energy harvester (PEH). This paper will present mathematical modelling approach, simulation verification and the conditional circuit named versatile precision full wave rectifier.
关键词： Silicon carbide,optimization,analytical modelling,cantilever beam,piezoelectric
更新于2025-09-23 15:22:29
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[Materials Horizons: From Nature to Nanomaterials] Advances in Polymer Sciences and Technology (Select Papers from APA 2017) || Triboelectric-Based Kinetic Energy Harvesting Using Polydimethylsiloxane (PDMS)
摘要： In this paper, we have presented a metal-to-dielectric attached-electrode parallel-plate contact-mode-type triboelectric energy harvester, which converts vibrational kinetic energy to electrical power. In this, a tribo-pair made of copper as metal and PDMS as dielectric has been demonstrated. A cantilever-based design is proposed in which copper tape is attached to a thick cardboard piece which is acting as tribo-layer as well as top electrode. The bottom electrode is single-side copper clad of FR4 printed circuit board (PCB) on which PDMS is spin coated. The fabricated harvester device has been tested by providing the mechanical vibration with manual tapping on cantilever structured electrode. Measurement has been carried out using digital oscilloscope which showed that peak output voltage, current, and instantaneous power density are 29.6 V, 29.6 μA, and 100.13 μW/cm2, respectively.
关键词： Tribo-pair,Cantilever,PCB,PDMS,Triboelectric
更新于2025-09-23 15:21:01
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Young’s modulus and fatigue investigation of aluminum nitride films deposited on 304 stainless steel foils using micro-fabricated cantilevers
摘要： Aluminum nitride based (AlN-based) piezoelectric vibration energy harvesters (PVEHs) have been received much attention in the power generation for the device in microelectromechanical systems (MEMS). During the long-time vibration, PVEHs are suffering cyclically dynamic stress. This may result in the defect of the materials, and finally cause the failure of the device. To achieve a reliable design of the device that can work for a long time without failure, the investigation on the mechanical properties of Young’s modulus and fatigue were conducted for AlN films deposited on 304 stainless steel (SUS 304) foils in this study. Two kinds of materials were tested, SUS 304 foils with a thickness of 50 μm (SUS 304 (50 μm)) and a composite material of AlN films deposited on both sides of SUS 304 foils (AlN (1 μm)/ SUS 304 (50 μm)/ AlN (1 μm) structure). The samples were micro-fabricated to cantilevers. Young’s modulus was measured by the micro-cantilever resonance method. The resonant bending fatigue testing method was used to investigate the fatigue properties of the materials. The displacement amplitude of the samples was recorded during the tests. A new criterion by using the change of amplitude versus number of cycles was proposed to define the fatigue life. As results, the Young’s modulus was 184.9 and 342.9 MPa, for SUS 304 foil and AlN film, respectively. Stress-cycle (S-N) curves were plotted by using the proposed criterion successfully. The fatigue strength of SUS 304 foils and the material with AlN/ SUS 304/ AlN structure was estimated to be 294 and 327 MPa, respectively. Fatigue failures of stable crack, intrusions and extrusions, and slip bands, appeared on the surface of SUS 304 foils after the long time vibration. No fatigue failure or surface defect was observed on AlN films.
关键词： 304 stainless steel foil,aluminum nitride film,Young’s modulus,fatigue,micro-fabricated cantilever
更新于2025-09-23 15:21:01
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[IEEE 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - Shanghai (2018.8.8-2018.8.11)] 2018 19th International Conference on Electronic Packaging Technology (ICEPT) - The mechanical simulation of a special biosensor
摘要： Cantilever-based sensor is kind of the most popular MEMS sensor. In this paper, by taking an example the process of analyzing a transducer is explained, such as building models and performing mathematic operations on result data to get the performance parameters of a cantilever-based sensor. We also state the principle of the cantilever bio-sensor. In the meantime we explain the theory of the operating of cantilever, and a cantilever sensor design guided by mechanical simulation.
关键词： simulation,ANSYS,biosensor,cantilever,MEMS
更新于2025-09-23 15:21:01
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Non-Linear Piezoelectric Actuator with a Preloaded Cantilever Beam
摘要： Piezoelectric actuation is widely used for the active vibration control of smart structural systems, and corresponding research has largely focused on linear electromechanical devices. This paper investigates the design and analysis of a novel piezoelectric actuator that uses a piezoelectric cantilever beam with a loading spring to produce displacement outputs. This device has a special nonlinear property relating to converting between kinetic energy and potential energy, and it can be used to increase the output displacement at a lower voltage. The system is analytically modeled with Lagrangian functional and Euler–Lagrange equations, numerically simulated with MATLAB, and experimentally realized to demonstrate its enhanced capabilities. The model is validated using an experimental device with several pretensions of the loading spring, therein representing three interesting cases: a linear system, a low natural frequency system with a pre-buckled beam, and a system with a buckled beam. The motivating hypothesis for the current work is that nonlinear phenomena could be exploited to improve the effectiveness of the piezoelectric actuator’s displacement output. The most practical configuration seems to be the pre-buckled case, in which the proposed system has a low natural frequency, a high tip displacement, and a stable balanced position.
关键词： piezoelectric,cantilever,Hamilton’s principle,actuator,pretension,transducer
更新于2025-09-19 17:15:36