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Atomic layer etching of chrome using ion beams
摘要： In this study, two Cr atomic layer etching (ALE) methods have been applied for the precise control of Cr etching. The first one involves O radical adsorption followed by Cl+ ion desorption (ALE with chemical ion desorption; chemical anisotropic ALE), and the second one involves Cl/O radical adsorption followed by Ar+ ion desorption (ALE with physical ion desorption; physical anisotropic ALE). Their effects on Cr etch characteristics were also investigated. For both the ALE methods, saturated Cr etch depth/cycle of 1.1 and 1.5 ? /cycle were obtained for the chemical and physical anisotropic ALE, respectively, while maintaining near-infinite etch selectivities with various Si-based materials like silicon, silicon dioxide, and silicon nitride. The ALE technique can be used to precisely control the thickness of materials, including metals such as Cr, without any surface damage.
关键词： etch selectivity,adsorption,atomic layer etching,x-ray photoelectron spectroscopy,ion beam,chrome
更新于2025-09-04 15:30:14
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A Multifunctional Ag/TiO <sub/>2</sub> /Reduced Graphene Oxide with Optimal Surface-Enhanced Raman Scattering and Photocatalysis
摘要： A multifunctional Ag/TiO2/reduced graphene oxide (rGO) ternary nanocomposite was prepared by a one-step photochemical reaction with TiO2 and Ag nanoparticles (NPs) successively deposited on reduced graphene oxide. The structure, morphology, composition, optical, and photoelectrochemical properties of Ag/TiO2/rGO were investigated in detail. Meanwhile, the ternary nanocomposite possessed much higher adsorption capacity to organic dyes compared with bare TiO2 and binary Ag/TiO2, which would help to its use for surface-enhanced Raman scattering (SERS) detection and photocatalytic degradation. Due to the charge transfer between rGO and organic dyes and enhanced electromagnetic mechanism (EM) of Ag, Ag/TiO2/rGO nanocomposites as surface-enhanced Raman scattering substrates demonstrated dramatically improved sensitivity and good uniformity. The detection limit of rhodamine 6G (R6G) was as low as 10-9 M, and the relative standard deviation (RSD) values of the intensities remained below 5 %. Most importantly, the synergistic coupling effect of three components extended the photoresponse range and accelerated separation of the electron-hole pairs, leading to greatly improved photocatalytic activity under simulated sunlight. The maximum rate constant (k, 0.06243 min?1) of Ag/TiO2/rGO was 50 and 4 times higher than that of TiO2 and Ag/TiO2, respectively.
关键词： SERS property,Titanium oxide,adsorption,graphene oxide,photocatalysis
更新于2025-09-04 15:30:14
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Flexible silver nanowire transparent conductive films prepared by an electrostatic adsorption self-assembly process
摘要： In this work, we reported a facile approach to fabricate silver nanowire (AgNW) networks on ?exible substrates. Through immersing the modi?ed poly (ethylene terephthalate) with positively charged functional group into the AgNW dispersion with anionic dispersant, a ?exible AgNW transparent conductive ?lm was formed by electrostatic adsorption self-assembly process. Even without a post-treatment process, the as-prepared ?exible AgNW ?lms exhibited excellent optoelectrical property, low surface roughness and high reliability. It was shown that the insulating dispersant on AgNWs could be effectively removed by an ion bombardment method and then greatly decreased the sheet resistance of AgNW networks. Because of the nature of spontaneous adsorption, this preparation method can be suitable for an arbitrary shaped substrate, which will broaden the application of AgNW conductive ?lms in optoelectronic devices.
关键词： self-assembly,transparent conductive ?lms,silver nanowire,electrostatic adsorption,flexible substrates
更新于2025-09-04 15:30:14
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Heterometallic Organic Frameworks Built from Trinuclear Indium and Cuprous Halide Clusters: Ligand-Oriented Assemblies and Iodine Adsorption Behavior
摘要： Two novel heterometallic organic frameworks built from trinuclear indium and cuprous halide clusters, [(In3O)2(Cu2I2)3(ina)12(H2O)6](NO3)2·7DMA·10H2O (1) and [NH2(CH3)2][In3(OH)2(H2O)2(ina)8(Cu4I4)2]·5DMA·8H2O (2), where Hina = isonicotinic acid, have been successfully constructed with the orientation of the ina ligand. 1 shows a fascinating highly porous honeycomb-like 3D cationic framework with a trigonal-bipyramid-type cage based on a planar [In3O(CO2)6]+ trimer and a rhombohedral Cu2I2 cluster. Comparably, 2 displays a 3D negative network with irregular hexagonal channels constructed from a [In3(OH)2(CO2)8]? trimer and a cubane-like Cu4I4 cluster. Especially, 1 displays a reversible I2 adsorption/release performance with high adsorption capacity, whose mechanism has been disclosed by theoretical simulation. Also, the green/red emission of 2 stems from iodocuprate centers with quenched indium-centered emission.
关键词： I2 adsorption,cuprous halide clusters,luminescence properties,heterometallic organic frameworks,trinuclear indium
更新于2025-09-04 15:30:14